Coupled Resonator Gravimetric Sensing for Large-Particle Detection

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Solution Overview

Problem

Existing SMR-type resonators face limitations in analyzing complex samples due to dimensional constraints of their fluidic channels, which restrict the size of particles that can be analyzed, and require prior sample preparation to avoid clogging, making them unsuitable for samples like blood containing a wide range of particle sizes.

Innovation Solution

A system combining a mechanical resonator with an integrated fluidic channel (SMR) and a gravimetric sensor (NEMS) mechanically coupled via a linkage element, allowing larger particles to be analyzed while maintaining detection sensitivity by measuring frequency fluctuations at the NEMS sensor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the fluidic channel dimensions are reduced to improve detection limit, then detection sensitivity is improved, but the maximum particle size that can be analyzed is reduced and clogging risk increases

Engineering Contradiction:
Improvedetection limitVSAvoidparticle size range
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The system is divided into two independent parts: an SMR resonator with large fluidic channel for particle injection and a NEMS gravimetric sensor with small dimensions for sensitive detection. The SMR handles sample introduction with particles of various sizes, while the NEMS provides high-resolution mass measurement, thus resolving the contradiction between detection limit and particle size adaptability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A mechanical coupling element acts as an intermediary between the SMR resonator and the NEMS gravimetric sensor. This coupling transfers vibrational energy from the SMR to the NEMS, allowing the large-channel SMR to drive the sensitive NEMS sensor without direct fluid contact, enabling both large particle analysis and high detection sensitivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the fluidic channel dimensions are reduced to improve detection limit, then detection sensitivity is improved, but the flow rate range is reduced and clogging occurs

Engineering Contradiction:
Improvedetection limitVSAvoidclogging resistance
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The system separates the functions of sample handling and detection. The SMR resonator with its large fluidic channel handles sample injection and particle transport, preventing clogging. The NEMS gravimetric sensor with its small dimensions performs sensitive mass detection. This functional segmentation resolves the contradiction between detection limit and clogging resistance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The NEMS gravimetric sensor is extracted from the fluidic channel environment and placed in a separate, fluid-free cavity. This extraction protects the sensitive NEMS sensor from clogging while allowing it to detect mass changes caused by particles passing through the SMR's fluidic channel, thus maintaining both high detection limit and reliability.

Inventive Principle:
Principle #2Taking out (Extraction)

3Adaptability or versatility

If a single resonator with fluidic channel is used, then particle analysis is possible, but detection sensitivity is limited

Engineering Contradiction:
Improveparticle analysis capabilityVSAvoiddetection sensitivity
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The system merges the advantages of two different resonator types: the SMR resonator provides large fluidic channel for versatile particle analysis, while the NEMS gravimetric sensor provides high detection sensitivity. The mechanical coupling between these two components allows them to work together as a unified system, achieving both particle analysis capability and high detection sensitivity simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The coupled resonator system achieves multi-functionality: the SMR resonator handles sample introduction and particle transport for various sizes, while the NEMS sensor provides precise mass measurement. This universal system can analyze different particle types and sizes with high sensitivity, surpassing the capabilities of a single resonator design.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the analysis of complex samples with a wider range of particle sizes and fluid flow rates, achieving a detection limit comparable to SMR-type resonators without the clogging risks, and improving detection sensitivity by three orders of magnitude.

Implementation Method 1

a mechanical oscillator or resonator, equipped with a suspended part that vibrates at its resonant frequency. Any target that attaches to the surface of the suspended part of the resonator causes an increase in its mass, which decreases its resonant frequency

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

By continuously measuring resonance frequency fluctuations, it is then possible to trace back to the mass adsorbed on the resonator in real time

Methodology Applied
Scientific EffectGravimetric sensing:

Implementation Method 3

The first suspended part of the mechanical resonator and the second suspended part of the first gravimetric sensor being mechanically coupled to each other via a mechanical linkage element

Methodology Applied
Scientific EffectMechanical coupling:

Implementation Method 4

the excitation means include at least one piezoceramic element

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 5

the measuring means include one or more piezoresistive gauges

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentEP4481377B1System and method for measuring at least one property of a particle using a mechanically coupled mechanical resonator and gravimetric sensor
Publication Date: 2026.02.25 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4481377B1 patent drawingFigure 1A~1B
  • EP4481377B1 patent drawingFigure 2~3B
  • EP4481377B1 patent drawingFigure 4A~4B

AI summary

The invention relates to a system for measuring at least one property of a particle (P), comprising: - A mechanical resonator (1) having at least a first fixed part (10) and a first suspended part (11) capable of vibrating relative to the first fixed part, and a fluidic circuit integrated in its suspended part, in which a fluid containing said particle (P) is made to circulate, - Excitation means (4) configured to vibrate the first suspended part (11) at an excitation frequency (F_smr), - A first gravimetric sensor (2) having at least a second fixed part (20) and a second suspended part (21) capable of vibrating relative to the second fixed part (20), - The first suspended part (11) of the mechanical resonator (1) and the second suspended part (21) of the first gravimetric sensor (2) being mechanically coupled to each other via a mechanical linking element (3).