Coupled Thermal Zone Control for Uniform IC Test Temperatures

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Solution Overview

Problem

Existing temperature control systems for electronic devices under test face challenges in maintaining uniform temperature across multiple chips due to temperature gradients, which can compromise test results.

Innovation Solution

A thermal system with multiple thermally-coupled zones, each equipped with independently controllable heaters and fans, where a control circuit transforms temperature measurements into a normal coordinate system to generate a power vector that minimizes temperature gradients across the zones.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single temperature control system is used for multiple chips, then device complexity is reduced, but temperature uniformity across chips deteriorates due to temperature gradients

Engineering Contradiction:
Improvetemperature control system complexityVSAvoidtemperature uniformity
Core Design Contradiction:
Device complexityVSTemperature

Solution Approach 1:

The temperature control system is segmented into multiple independent zones, each with its own heater and temperature sensor. This allows each zone to be controlled independently, eliminating temperature gradients across the chip while maintaining manageable system complexity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each zone is equipped with local temperature sensing and heating capabilities, enabling localized temperature adjustment. This ensures that each specific area of the chip receives appropriate thermal management, achieving uniform temperature distribution across the entire chip surface.

Inventive Principle:
Principle #3Local quality

2Temperature

If multiple independent temperature control systems are used for each chip, then temperature uniformity is improved, but device complexity increases

Engineering Contradiction:
Improvetemperature uniformityVSAvoidtemperature control system complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

Multiple temperature control systems are merged into a unified modular architecture where each zone shares common control logic and communication protocols. This reduces overall system complexity while maintaining the temperature uniformity benefits of independent zone control.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The temperature control system is designed with universal components that can serve multiple functions - heaters provide both heating and temperature sensing capabilities, and the control system can manage multiple chips simultaneously. This multi-functionality reduces the need for separate dedicated components for each chip.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If temperature measurements are taken frequently, then temperature control precision is improved, but measurement and processing time increases

Engineering Contradiction:
Improvetemperature measurement precisionVSAvoidtemperature measurement time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

Temperature thresholds and control parameters are pre-calculated and stored in the control system. When temperature measurements are taken, the system can quickly compare against pre-established criteria and execute appropriate control actions, reducing processing time while maintaining measurement precision.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system implements continuous feedback control where temperature measurements are rapidly taken and immediately used to adjust heater power. This closed-loop feedback mechanism ensures precise temperature control with minimal delay, as the system continuously monitors and responds to temperature changes in real-time.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively maintains uniform temperature across multiple zones, reducing temperature gradients and ensuring accurate test results by dynamically adjusting heat distribution based on real-time temperature measurements.

Implementation Method 1

a block (e.g., plate, holder, nest, etc.) may be placed in thermal contact with one or more chips, while the temperature of the block is controlled

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

a plurality of temperature sensors. Each of the plurality of temperature sensors configured to measure temperature of one of the plurality of thermally-coupled zones

Methodology Applied
Scientific EffectThermal radiation detection: Thermal Radiation

Implementation Method 3

a block (e.g., plate, holder, nest, etc.) may be placed in thermal contact with one or more chips

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP4272044B1Integrated circuit testing device with coupled control of thermal system
Publication Date: 2024.10.09 DELTA DESIGN INC
  • EP4272044B1 patent drawingFigure 1
  • EP4272044B1 patent drawingFigure 2
  • EP4272044B1 patent drawingFigure 3

AI summary

A system includes a plurality of thermally-coupled zones and a plurality of thermal control devices, each controllable to thermally control one of the plurality of zones, and a plurality of temperature sensors, each configured to measure temperature of one of the plurality of zones. The system includes a control circuit configured to receive a temperature measurement for each of the plurality of zones, collect the temperature measurements in a temperature vector in a real coordinate system, and transform the temperature vector to a normal coordinate system that provides a plurality of uncoupled equations. The control circuit is configured to determine, based on the plurality of uncoupled equations and a desired temperature gradient, a desired power vector in the normal coordinate system, transform the desired power vector to the real coordinate system to generate a power vector, and control the plurality of heaters in accordance with the power vector.