Cover Support Pads for Low-Evaporation Layer Forming Transfer
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Solution Overview
Problem
Existing planarization and imprinting techniques face challenges in reducing the evaporation of formable material during substrate transfer from a dispensing station to a planarizing/imprinting station, leading to deviations in target residual layer thickness.
Innovation Solution
A system comprising a dispensing station, a shaping station, and a positioning system with a cover having support pads to support a plate, which minimizes evaporation by maintaining the formable material in a controlled environment during substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate is moved from the dispensing station to the planarizing/imprinting station, then the planarization process can continue, but the formable material evaporates leading to deviation from target residual layer thickness
Solution Approach 1:
The cover is positioned over the hand holding the substrate, creating a nested structure where the cover encloses the hand and substrate. This nesting provides a controlled environment that prevents evaporation during transfer while maintaining process continuity.
Solution Approach 2:
The cover creates a sealed or semi-sealed environment around the substrate and formable material during transfer. This isolated atmosphere prevents direct exposure to ambient conditions that cause evaporation, thereby maintaining the target residual layer thickness.
2Ease of operation
If a positioning system is used to transfer the substrate, then the substrate can be moved between stations, but additional positioning systems are needed to prevent evaporation
Solution Approach 1:
The cover serves multiple functions: it protects the formable material from evaporation, provides structural support for the plate during shaping, and can be integrated with the existing positioning system. This multi-functionality reduces the need for additional dedicated evaporation prevention systems.
Solution Approach 2:
The evaporation prevention function is merged with the substrate handling system by integrating the cover into the hand assembly. This combination allows the same positioning system to handle both substrate transfer and evaporation protection without requiring separate systems.
3Reliability
If the cover is positioned over the hand to prevent evaporation, then the formable material is protected, but the plate needs support during the shaping process
Solution Approach 1:
The support pads are positioned locally on the topside surface of the cover at specific locations where plate support is needed. This localized approach provides necessary support functionality without requiring a completely redesigned cover structure, maintaining simplicity while ensuring reliability.
Data Source
AI summary
A system for forming a layer on a substrate, the system comprising a dispensing station configured to dispense formable material on the substrate, a shaping station configured to contact the dispensed formable material on the substrate with a plate, and a positioning system. The positioning system includes a hand configured to hold the substrate, a cover having an underside surface facing the hand and a topside surface opposite the underside surface, the cover being configured such that the underside surface covers the substrate and the dispensed formable material when the cover is positioned over the hand, and a plurality of support pads positioned on the topside surface of the cover, the plurality of support pads being configured to support the plate.