Cover Substrate Inspection via Noise-Corrected Imaging
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Solution Overview
Problem
During the inspection of defects in a cover substrate for display devices, removing the protective film can damage the substrate, while inspecting with the film intact may compromise accuracy.
Innovation Solution
A method involving a cover substrate assembly with a protective film and an inspection pattern between the substrate and the film, where images are taken through the substrate to obtain noise data, which is then used to correct imaging defects and detect substrate defects accurately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the protective film is removed to inspect defects, then inspection accuracy is improved, but the cover substrate may be damaged
Solution Approach 1:
The patent applies preliminary action by capturing a reference image of the inspection pattern through the protective film before actual defect inspection. This reference image is used to identify and remove noise (such as reflections and patterns from the protective film) from subsequent inspection images, enabling accurate defect detection while the protective film remains in place, thus preventing substrate damage.
Solution Approach 2:
The patent uses copying by creating a reference image that replicates the appearance of the inspection pattern as seen through the protective film. This reference copy is then compared with actual inspection images to identify and eliminate noise artifacts, allowing accurate defect detection without physically removing the protective film.
2Object-affected harmful factors
If the protective film remains attached during inspection, then substrate protection is maintained, but inspection accuracy deteriorates due to noise
Solution Approach 1:
The patent applies the extraction principle by isolating and removing noise components from the inspection images. By comparing inspection images with a reference image captured through the protective film, the system extracts and eliminates noise (such as reflections and protective film patterns) while preserving the actual defect information, enabling accurate inspection with the protective film intact.
Solution Approach 2:
The patent implements feedback by using the reference image to continuously correct and improve the quality of inspection images. The noise identification results from comparing the reference image with inspection images are fed back to enhance subsequent inspections, allowing consistent accurate defect detection while the protective film remains attached.
Data Source
AI summary
A method of manufacturing a display device includes preparing a cover substrate assembly including a cover substrate, a protective film attached to a lower surface of the cover substrate, and an inspection pattern disposed between the cover substrate and the protective film, obtaining a first image by imaging the inspection pattern through an upper surface of the cover substrate, obtaining noise data by comparing a reference image of the inspection pattern with the first image, obtaining a second image by imaging the cover substrate assembly, obtaining a corrected image of the second image by reflecting the noise data in the second image, and detecting a defect of the cover substrate based on the corrected image of the second image.