Cover Vibration Suppression in Semiconductor Substrate Processing
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Solution Overview
Problem
During the unloading process of a substrate from a substrate processing apparatus, the cover's vibration causes the substrate to bounce or fall, potentially damaging it due to the sealing member adhering to the process pipe's surface, leading to deformation and vibration of the cover.
Innovation Solution
A substrate processing apparatus equipped with a controller that controls the speed and torque of the motor driving the elevation mechanism to maintain the substrate at a rest position within the boat during the recovery from deformation of the cover when the sealing member is separated from the process pipe or cover surface, thereby stabilizing the substrate during unloading.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the cover is moved downward quickly to unload the boat, then productivity is improved, but the cover bends and vibrates causing substrate damage
Solution Approach 1:
The motor drives the elevation mechanism in a controlled periodic manner: first moving the cover downward at a first speed to separate the sealing member, then moving at a second (slower) speed during the cover's recovery period, and finally returning to normal speed after vibration subsides. This periodic speed adjustment eliminates continuous vibration while maintaining overall productivity.
Solution Approach 2:
The system dynamically adjusts the cover's movement speed based on its state: using a first speed when the sealing member needs separation, switching to a second slower speed when the cover is recovering from deformation to prevent vibration, and returning to normal operation after the cover stabilizes. This dynamic speed control resolves the contradiction between fast unloading and vibration prevention.
2Reliability
If the sealing member is adhered to the process pipe surface for sealing, then sealing effectiveness is improved, but the cover deforms and vibrates during separation
Solution Approach 1:
The system applies a preliminary anti-action by controlling the motor to move the cover downward at a specific first speed before the actual separation occurs, preparing for the adhesive force in advance. Then during the critical separation and recovery phase, it switches to a slower second speed to counteract the vibration that would otherwise be generated by sudden separation.
Solution Approach 2:
The motor performs a preliminary action by initially moving the cover downward to separate the sealing member from the process pipe surface before the cover's elastic recovery can cause vibration. This preliminary movement at controlled speed prepares the system for the subsequent slower movement during recovery, preventing harmful vibrations while maintaining sealing effectiveness.
3Productivity
If the cover is moved to separate the sealing member, then unloading progress is improved, but substrate position stability deteriorates due to vibration
Solution Approach 1:
The motor implements periodic speed adjustment: operating at a first speed to advance the unloading process by separating the sealing member, then switching to a second slower speed during the cover's recovery period to maintain substrate position stability, and finally returning to normal speed after vibration ceases. This periodic control achieves both unloading progress and precision.
Solution Approach 2:
The system maintains continuous useful action by seamlessly transitioning between different motor speeds: the first speed continues the unloading process, the second slower speed continues protection during recovery, and the return to normal speed continues productivity. This continuous multi-speed operation ensures both unloading progress and substrate stability without interruption.
Data Source
AI summary
A substrate processing apparatus suppresses vibration of a cover when unloading a boat from a process pipe. The apparatus comprises a boat for placing a substrate, a process pipe configured to accommodate the boat, a cover having the boat placed thereon, the cover configured to open and close a furnace port installed on a lower end of the process pipe, a motor to drive an elevation mechanism which moves the cover upward and downward, a sealing member to seal a space between the cover and the process pipe, and a controller to control motor speed and limit motor torque while the cover moves from the furnace port to a predetermined position. The substrate is maintained at a rest position in the boat during a recovery from a deformation of the cover occurring when separating the sealing member from the cover surface or the process pipe surface.