Cr Strain Gauge Film Thickness for Low Transverse Sensitivity

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Solution Overview

Problem

Existing strain gauges with high gauge factors suffer from detection errors due to high transverse sensitivity ratios, which affect accuracy.

Innovation Solution

A strain gauge with a resistor made of Cr as a main component and a film thickness of 200 nm or greater, achieving a transverse sensitivity ratio of 70% or less and a gauge factor of 5 or greater.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the gauge factor is increased to improve strain detection sensitivity, then the detection sensitivity is improved, but the transverse sensitivity ratio increases causing detection errors

Engineering Contradiction:

Improvestrain detection sensitivityVSAvoiddetection accuracy

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The invention changes the physical parameters of the Cr resistor by controlling its film thickness to be 200 nm or greater. This parameter change modifies the material's properties to achieve a gauge factor of 5 or greater while simultaneously reducing the transverse sensitivity ratio to 70% or less, thereby resolving the contradiction between detection sensitivity and accuracy

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If Cr-containing resistors are used to achieve high gauge factor, then axial sensitivity is improved, but transverse sensitivity becomes as high as axial sensitivity

Engineering Contradiction:

Improveaxial sensitivityVSAvoidtransverse sensitivity interference

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

By changing the film thickness parameter of the Cr resistor to 200 nm or greater, the invention achieves axial sensitivity improvement while suppressing the harmful transverse sensitivity effect, reducing it to 70% or less of the axial sensitivity

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The invention uses Cr as the main component material for the resistor, utilizing its specific material properties to achieve the desired sensitivity characteristics when combined with the controlled film thickness

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The strain gauge provides improved accuracy by maintaining a high gauge factor while reducing the transverse sensitivity ratio, enhancing strain detection precision.

Implementation Method 1

The gauge factor of strain gauges is typically approximately 2, but some strain gauges that include resistors containing Cr as a main component has a gauge factor of approximately 10

Methodology Applied

Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS20260029284A1Strain gauge

Publication Date: 2026.01.29 MINEBEAMITSUMI INC

AI summary

The present strain gauge includes a substrate and a resistor formed on the substrate. The resistor is made of a material mainly composed of Cr. A film thickness of the resistor is 200 nm or greater such that the strain gauge has a transverse sensitivity ratio of 70% or less and a gauge factor of 5 or greater.