Crack-Structured Electrode Sensor for High Sensitivity
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Solution Overview
Problem
Resistive pressure sensors face limitations in sensitivity due to material and process constraints, necessitating a structural design approach to enhance sensitivity.
Innovation Solution
A sensor design featuring a substrate layer that deforms in response to external forces, with an electrode layer having a crack structure that changes electrical resistance, allowing for increased sensitivity through controlled deformation of the crack structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the resistivity coefficient of the electrode layer material is increased to improve sensitivity, then the sensitivity of the resistive pressure sensor is improved, but the material selection and manufacturing process are limited by material and process constraints
Solution Approach 1:
The electrode layer is segmented into multiple discrete conductive elements arranged in a grid pattern, creating numerous small contact points between the electrode layer and substrate. This segmentation increases the effective contact area and allows for greater resistance change in response to substrate deformation, thereby improving sensitivity without requiring materials with inherently high resistivity coefficients.
Solution Approach 2:
The invention transitions from a conventional planar electrode design to a three-dimensional grid structure with vertical conductive elements. This dimensional change creates multiple layers of contact interfaces, increasing the effective measurement volume and enhancing the sensor's ability to detect substrate deformation through resistance changes.
2Measurement precision
If the crack structure dimension is reduced to increase resistance change, then the sensitivity is improved, but the electrical resistance variation becomes nonlinear and difficult to control
Solution Approach 1:
The conductive elements in the grid structure have varying dimensions and spacing in different regions, creating local variations in contact area and resistance. This local quality variation allows for tailored sensitivity in different areas of the sensor while maintaining overall linear response characteristics through proper design of the grid pattern.
Solution Approach 2:
The invention systematically varies multiple parameters of the grid structure including element size, spacing, and orientation to optimize the resistance-deformation relationship. By adjusting these parameters, the sensor achieves both high sensitivity and linear response characteristics.
3Measurement precision
If the substrate layer is made more flexible to enhance deformation response, then the sensitivity is improved, but the structural strength and reliability are reduced due to stress concentration
Solution Approach 1:
The substrate layer is segmented into multiple support regions separated by gaps, allowing localized deformation in the gap areas while maintaining structural integrity in the support regions. This segmentation enables enhanced deformation response in the sensing area without compromising overall structural strength and reliability.
Solution Approach 2:
The substrate structure features asymmetric design with different thicknesses and support configurations in different regions. The thinner regions provide enhanced flexibility for deformation response, while the thicker support regions maintain structural strength, creating an optimized balance between sensitivity and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves enhanced sensitivity by amplifying small deformations and reducing reliability degradation from stress concentration, with adjustable electrical resistance variations for improved output quality.
Implementation Method 1
The sensitivity of the resistive sensors is mainly determined by a resistivity coefficient of material thereof. However, the resistivity coefficient is often limited by factors such as materials and processes, making it difficult to be significantly increased. Therefore, it is necessary to propose sensors that can overcome the limitations of materials and processes and improve the sensitivity from a structural design perspective.
Implementation Method 2
A deformation of the substrate layer may change a dimension of the crack structure to change an electrical resistance of the electrode layer and to generate a sensing signal changing along with the electrical resistance.
Data Source
AI summary
The present disclosure relates to a sensor including a substrate layer and an electrode layer. The substrate layer is configured to deform in response to an external force, and the electrode layer is arranged on the substrate layer. The electrode layer includes a crack structure, and a deformation of the substrate layer changes a dimension of the crack structure, thereby changing an electrical resistance of the electrode layer and generating a sensing signal changing along with the electrical resistance.