Creep Compensation in Microlithographic Optical Imaging Devices
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Solution Overview
Problem
In microlithographic optical systems using extreme ultraviolet (EUV) light, conventional designs face challenges in maintaining high imaging accuracy due to creep and settling effects in vibration decoupling devices, leading to changes in the static relative situation between supporting structures, which require large motion reserves in the relative situation control device, increasing costs and complexity.
Innovation Solution
A microlithographic optical arrangement with a creep compensation device that actively adjusts the length or distance of supporting spring devices to compensate for changes in static relative situations, using controllable active adjustment elements such as force actuators, Lorentz actuators, or piezoelectric elements to maintain initial states and reduce the need for extensive motion reserves in the relative situation control device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If vibration decoupling devices with supporting spring devices are used to support the second supporting structure, then vibration isolation is improved, but creep and settling effects cause changes in static relative situation over time, requiring large motion reserves and increasing device complexity
Solution Approach 1:
The creep compensation device performs preliminary action by actively adjusting the supporting spring devices to compensate for anticipated creep and settling effects. The control device monitors changes in static relative situation and proactively adjusts the supporting structures before these changes affect imaging accuracy, thereby reducing the motion reserve requirements of the relative situation control device.
Solution Approach 2:
The system implements feedback through the control device that continuously monitors the static relative situation between the first and second supporting structures. When creep or settling effects cause positional changes, the control device sends adjustment commands to the creep compensation device, which then modifies the supporting spring devices to restore the original relative positioning, creating a closed-loop control system.
2Manufacturing precision
If the relative situation control device is designed with large motion reserves to compensate for creep effects, then imaging accuracy is maintained, but device complexity and costs increase
Solution Approach 1:
The system segments the control function into two distinct parts: the relative situation control device handles dynamic positioning adjustments, while the creep compensation device specifically addresses long-term creep and settling effects. This segmentation allows each device to be optimized for its specific function, reducing the motion reserve requirements of the relative situation control device and lowering overall system complexity.
Solution Approach 2:
The creep compensation device acts as an intermediary between the supporting structures and the relative situation control device. It compensates for creep effects at the support level, thereby protecting the relative situation control device from having to handle these low-frequency drifts, which reduces its motion reserve requirements and simplifies its design.
3Speed
If supporting spring devices are used for vibration decoupling, then dynamic vibration isolation is improved, but long-term static position stability deteriorates due to creep effects
Solution Approach 1:
The system applies dynamics by making the supporting spring devices adjustable through the creep compensation device. While the spring devices provide passive vibration isolation, their length or distance from the supporting structures can be actively modified in response to detected creep effects, allowing the system to adapt its static position while maintaining its dynamic vibration isolation characteristics.
Solution Approach 2:
The creep compensation device changes the physical parameters of the supporting spring devices, specifically their length or distance from the supporting structures, to compensate for creep effects. By adjusting these parameters in response to monitored static relative situation changes, the system maintains position stability while preserving the vibration isolation properties of the spring devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for high imaging quality with reduced motion reserves in the relative situation control device, minimizing costs and maintaining imaging accuracy over the system's lifetime by compensating for creep and settling effects, thereby simplifying the design and operation of the optical imaging device.
Implementation Method 1
a plurality of supporting spring devices of a vibration decoupling device, which act kinematically parallel to one another between the first supporting structure and the second supporting structure
Implementation Method 2
using controllable active adjustment elements such as force actuators, Lorentz actuators, or piezoelectric elements
Implementation Method 3
using controllable active adjustment elements such as force actuators, Lorentz actuators, or piezoelectric elements
Data Source
AI summary
An arrangement of a microlithographic optical imaging device includes first and supporting structures. The first supporting structure supports an optical element of the imaging device. The first supporting structure supports the second supporting structure via supporting spring devices of a vibration decoupling device. The supporting spring devices act kinematically parallel to one another between the first and second supporting structures. Each supporting spring device defines a supporting force direction and a supporting length along the supporting force direction. The second supporting structure supports a measuring device configured to measure the position and/or orientation of the optical element in relation to a reference in at least one degree of freedom and up to all six degrees of freedom in space. A creep compensation device compensates a change in a static relative situation between the first and second supporting structures in at least one correction degree of freedom.