Creep Feed Grinding Wheel Cleaning for Continuous Bottom Surface Correction

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Solution Overview

Problem

Creep feed grinding apparatuses experience grindstone condition failures at the bottom surfaces of grindstones, particularly when grinding resin substrates, leading to reduced efficiency due to the additional dressing steps required to address these failures.

Innovation Solution

Incorporation of a bottom surface state adjusting mechanism, such as nozzles for high-pressure water, abrasive grains, two-fluid mixtures, dressers, or brushes, positioned outside the relative movement area of the chuck table and grinding unit, to clean and correct the grindstone bottom surfaces during the grinding process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a dressing step is added to eliminate grindstone condition failures, then reliability of grindstone operation is improved, but productivity is reduced due to additional processing time

Engineering Contradiction:
Improvegrindstone operation reliabilityVSAvoidgrinding efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The bottom surface state adjusting mechanism performs preliminary cleaning and correction of the grindstone bottom surfaces before grinding operations begin. By continuously removing debris and restoring the bottom surfaces during the creep feed grinding process, the system prevents condition failures without requiring separate dressing steps, thus maintaining productivity while improving reliability

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The adjusting mechanism operates continuously during the grinding process, maintaining the bottom surfaces of the grindstones in an optimal state throughout operation. This continuous action eliminates the need for intermittent dressing stops, ensuring both high reliability and sustained productivity

Inventive Principle:
Principle #20Continuity of useful action

2Manufacturing precision

If the annular grinding surface is positioned to grind the reverse side of the workpiece in creep feed mode, then manufacturing precision is improved, but the bottom surfaces of the grindstones suffer condition failures due to excessive wear

Engineering Contradiction:
Improvewafer thickness precisionVSAvoidgrindstone condition
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention extracts the function of bottom surface maintenance from the traditional dressing process and integrates it into the grinding system. By separating the bottom surface adjustment function from the side surface grinding function and positioning the adjusting mechanism outside the relative movement area, the system can maintain grindstone bottom surfaces without interfering with the precision grinding operation

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The bottom surface state adjusting mechanism acts as an intermediary that continuously removes debris and restores the bottom surfaces of the grindstones. This intermediary function prevents the direct harmful effect of excessive wear and condition failures, allowing the grindstones to maintain their precision grinding capability throughout extended operation

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Eliminates grindstone condition failures without reducing the efficiency of the grinding process, allowing for continuous operation and improved durability of the grindstones.

Implementation Method 1

a chuck table having a holding surface for holding a workpiece under suction thereon

Methodology Applied
Scientific EffectSuction: Suction

Implementation Method 2

the bottom surface state adjusting mechanism has a first nozzle for ejecting high-pressure water to the bottom surfaces of the grindstones

Methodology Applied
Scientific EffectHigh-pressure water cleaning: Jet Erosion

Implementation Method 3

a second nozzle for ejecting high-pressure water including abrasive grains to the bottom surfaces of the grindstones

Methodology Applied
Scientific EffectAbrasion: Abrasion

Implementation Method 4

a laser beam applying unit including a beam condenser for applying a laser beam to the bottom surfaces of the grindstones

Methodology Applied
Scientific EffectLaser heating: Laser

Data Source

PatentUS12617054B2Creep feed grinding apparatus
Publication Date: 2026.05.05 DISCO CORP
  • US12617054B2 patent drawing
  • US12617054B2 patent drawing
  • US12617054B2 patent drawing

AI summary

A creep feed grinding apparatus includes a chuck table, a grinding unit having a spindle and a grinding wheel mounted on a lower end of the spindle, the grinding wheel including a plurality of grindstones disposed in an annular array on a surface of an annular base, the grindstones following an annular track upon rotation of the spindle, a moving mechanism for moving the chuck table and the grinding unit relative to each other along a predetermined direction perpendicular to the longitudinal axis of the spindle, and a bottom surface state adjusting mechanism for adjusting states of bottom surfaces of the grindstones by cleaning and/or correcting the bottom surfaces of the grindstones. The bottom surface state adjusting mechanism is positioned outside of a relative movement area of the chick table in which the chuck table and the grinding unit are moved relative to each other by the moving mechanism.