Cross-Over Die Interconnects for High-Density Chiplet Links

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Solution Overview

Problem

As semiconductor technologies advance, scaling interconnectivity between individual dies in a System-on-a-Chip (SoC) becomes challenging due to increasing I/O connections and the limitations of conventional connection technologies, such as post-fabrication redistribution layers and flip chip bonding, which struggle to achieve high density and short channel connections.

Innovation Solution

The use of cross-over die and through-die vias to create interconnects between dies, where an interconnect die is bonded to through-die vias in other dies, providing high-density communication pathways and acting as a bridge between them, enabling efficient signal, power, and ground delivery, and potentially including active functional circuit blocks for enhanced connectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional connection technologies (post-fabrication redistribution layers and flip chip bonding) are used to connect individual dies, then the design flexibility and yield are improved, but the connection density and channel length become insufficient

Engineering Contradiction:
Improveconnection densityVSAvoidinterconnect structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent transitions from planar 2D interconnect arrangements to 3D vertical interconnect structures by stacking dies and using through-die vias. This dimensional change enables high-density connections by utilizing the vertical space dimension, allowing multiple connection layers and pathways that cannot be achieved in conventional 2D layouts.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested interconnect structures where through-die vias pass through entire die substrates, and interconnect layers are embedded within die structures. The cross-over die technique allows one die to be positioned over another with interconnects routing through and between them, creating a nested arrangement that maximizes connection density within limited space.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If the number of I/O pins increases to maintain connectivity as dies shrink, then the functional capability is improved, but the scalability and manufacturing difficulty deteriorate

Engineering Contradiction:
Improveintegration scalabilityVSAvoidI/O connection precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent divides the monolithic SoC into multiple separate dies (functional segments) that are individually fabricated and then interconnected through 3D stacking. This segmentation allows each die to be optimized independently, improves manufacturing yield by isolating defects to individual dies, and enables parallel fabrication processes that enhance overall productivity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces intermediary structures including bump electrodes, solder layers, and encapsulant materials that facilitate precise alignment and connection between stacked dies. These intermediary elements act as mediators that compensate for manufacturing tolerances and enable high-precision connections without requiring extreme manufacturing precision at each interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If individual dies are separated to improve yield and reduce design complexity, then the manufacturing flexibility is improved, but the interconnect performance and efficiency worsen

Engineering Contradiction:
Improvedie fabrication flexibilityVSAvoidinterconnect performance
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent merges multiple separate dies into a unified 3D integrated structure through bonding interfaces and interconnect networks. While the dies remain physically separate for manufacturing purposes, they are functionally merged through the interconnect architecture to achieve monolithic-like performance and efficiency, combining the benefits of both separate fabrication and integrated performance.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11830817B2Creating interconnects between dies using a cross-over die and through-die vias
Publication Date: 2023.11.28 ADVANCED MICRO DEVICES INC
  • US11830817B2 patent drawing
  • US11830817B2 patent drawing
  • US11830817B2 patent drawing

AI summary

A semiconductor package includes a first die, a second die, and an interconnect die coupled to a first plurality of through-die vias in the first die and a second plurality of through-die vias in the second die. The interconnect die provides communications pathways the first die and the second die.