Cross Point Memory Array Select Device Configuration

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Solution Overview

Problem

Existing memory technologies face challenges in efficiently reading and writing data using ferroelectric capacitors, as the act of reading reverses the polarization state, requiring immediate rewriting, and phase change memory materials are limited by high temperatures for phase transitions.

Innovation Solution

The development of an array of cross-point memory cells utilizing a select device and a programmable device in series, with a ferroelectric capacitor or phase change material, where the select device is electrically coupled to one of the lines and the programmable device is coupled to both lines, allowing for efficient data storage and retrieval without immediate rewriting, and using a U-shaped or L-shaped configuration for the select device to optimize material usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If ferroelectric capacitor is used for non-volatile memory storage, then data retention is improved, but reading operation causes polarization reversal requiring immediate rewriting

Engineering Contradiction:
Improvedata retentionVSAvoidreading efficiency
Core Design Contradiction:
Duration of action of stationary objectVSProductivity

Solution Approach 1:

A select device is introduced as an intermediary element between the read/write circuitry and the ferroelectric capacitor. This select device controls current flow to enable reading operations without causing unwanted polarization reversal in the memory cell, thus maintaining data integrity while enabling efficient read access.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The memory cell is segmented into distinct functional components: a select device and a programmable device (ferroelectric capacitor). The select device handles current control and read operations, while the programmable device maintains data storage. This segmentation allows independent optimization of read operations without affecting data retention.

Inventive Principle:
Principle #1Segmentation

2Duration of action of stationary object

If phase change material is used for non-volatile memory, then data retention is improved, but high temperatures are required for phase transitions

Engineering Contradiction:
Improvedata retentionVSAvoidphase transition temperature
Core Design Contradiction:
Duration of action of stationary objectVSTemperature

Solution Approach 1:

The patent modifies the physical and chemical parameters of the phase change material to reduce the temperature required for phase transitions. By changing material composition and structural parameters, the phase change occurs at lower temperatures, enabling non-volatile memory operation without excessive thermal requirements.

Inventive Principle:
Principle #35Parameter changes

3Quantity of substance

If U-shaped or L-shaped configuration is used for select device, then material usage is optimized, but device fabrication complexity increases

Engineering Contradiction:
Improvematerial usage efficiencyVSAvoidfabrication complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The select device is configured in U-shaped or L-shaped geometries that allow a single continuous material layer to serve multiple functions and interconnect multiple memory cells. This merging approach optimizes material usage by eliminating redundant structures while the shapes are designed to be compatible with standard fabrication processes.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables non-volatile data storage with reduced polarization reversal during reading and efficient phase transitions, improving the reliability and efficiency of memory cell operations.

Implementation Method 1

One type of capacitor is a ferroelectric capacitor which has ferroelectric material as at least part of the insulating material. Ferroelectric materials are characterized by having two stable polarized states and thereby can comprise programmable material of a memory cell.

Methodology Applied
Scientific EffectFerroelectricity:

Implementation Method 2

Energy as an electric field may be electrostatically stored within such material.

Methodology Applied
Scientific EffectElectrostatic energy storage: Electrostatics

Implementation Method 3

Such memory uses a reversibly programmable material that has the property of switching between two different phases, for example between an amorphous disorderly phase and a crystalline or polycrystalline orderly phase.

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 4

Starting from an amorphous state and rising to temperature above about 400° C., a rapid nucleation of crystallites may occur and, if the material is kept at the crystallization temperature for a sufficient time, it undergoes a phase change to become crystalline.

Methodology Applied
Scientific EffectNucleation: Nucleation

Data Source

PatentUS11101271B2Array of cross point memory cells and methods of forming an array of cross point memory cells
Publication Date: 2021.08.24 MICRON TECHNOLOGY INC
  • US11101271B2 patent drawing
  • US11101271B2 patent drawing
  • US11101271B2 patent drawing

AI summary

A method of forming an array of cross point memory cells comprises using two, and only two, masking steps to collectively pattern within the array spaced lower first lines, spaced upper second lines which cross the first lines, and individual programmable devices between the first lines and the second lines where such cross that have an upwardly open generally U-shape vertical cross-section of programmable material laterally between immediately adjacent of the first lines beneath individual of the upper second lines. Arrays of cross point memory cells independent of method of manufacture are disclosed.