Cross-Scale Surface Machining Using Multi-Component Collaborative Vibration
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Solution Overview
Problem
Existing machining methods for cross-scale structure feature surfaces, such as those with nanometer-, micron-, and millimeter-scale structures, are limited by high cost, complex processes, and difficulty in large-scale production, and current techniques like energy beam etching and diamond tool-based methods struggle with flexibility and tool dimension constraints.
Innovation Solution
A cross-scale structure feature surface machining method utilizing a multi-component collaborative vibration system involving a vibrating tool, servo movement mechanism, and three-axis movement platform, which applies elliptic vibration, z-axis vibration, and z-axis movement to form the required structure in a single process, allowing for multi-frequency and multi-scale adjustments of cutting depth.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If energy beam etching or electrochemical machining is used to machine nanometer-scale structures, then machining precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent applies ultrasonic vibration to the diamond tool at high frequency (20-100 kHz) to enable the tool to vibrate during machining. This vibration allows the tool to periodically separate from the workpiece, reducing cutting resistance and enabling the removal of extremely small material amounts. The vibratory motion transforms continuous cutting into intermittent micro-cutting, achieving nanometer-scale precision without requiring complex energy beam equipment or electrochemical processes.
Solution Approach 2:
The patent replaces complex energy beam systems and electrochemical machining systems with a simplified mechanical ultrasonic vibration system. By using a diamond tool with ultrasonic vibration, the patent achieves nanometer-scale machining precision while avoiding the high equipment complexity and cost associated with electron beam etching, focused ion beam machining, or electrochemical processes.
2Productivity
If diamond tool-based ultra-precision machining is used, then cost and productivity are improved, but manufacturing precision for nanometer-scale structures deteriorates due to tool dimension constraints
Solution Approach 1:
The patent applies ultrasonic vibration to the diamond tool at high frequency (20-100 kHz) to enable the tool to vibrate during machining. This vibration allows the tool to periodically separate from the workpiece, reducing cutting resistance and enabling the removal of extremely small material amounts. The vibratory motion transforms continuous cutting into intermittent micro-cutting, achieving nanometer-scale precision while maintaining the productivity advantages of mechanical machining.
Solution Approach 2:
The patent transforms the static diamond tool into a dynamically vibrating tool. The ultrasonic vibration introduces time-varying motion to the cutting edge, allowing the tool to adapt its cutting depth and engagement dynamically. This dynamic behavior enables the tool to machine nanometer-scale features by controlling the amplitude and frequency of vibration, overcoming the limitation of fixed tool dimensions.
3Productivity
If single-point diamond tool imprinting is used, then productivity is improved, but manufacturing precision and adaptability deteriorate due to tool shape and movement mechanism limitations
Solution Approach 1:
The patent applies ultrasonic vibration to the diamond tool to enable rapid material removal while maintaining high precision. The vibration allows the tool to cut rather than merely imprint, creating cleaner edges and more accurate geometries. The high-frequency oscillation reduces tool-workpiece contact time, minimizing plastic deformation and improving the precision of machined features while maintaining rapid machining speeds.
Solution Approach 2:
The patent changes the cutting parameters by introducing ultrasonic vibration frequency (20-100 kHz) and amplitude control. This parameter change transforms the machining mechanism from static imprinting to dynamic vibration cutting, enabling precise control over material removal. The variable vibration parameters allow adaptation to different workpiece materials and feature geometries, improving both precision and adaptability while maintaining high productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the process flow, improves machining efficiency, and enables high-quality, large-scale production of cross-scale structures without being limited by tool shape, while reducing costs compared to energy beam and electrochemical methods.
Implementation Method 1
a vibrating tool... applies elliptic vibration, z-axis vibration... to form the required structure
Data Source
AI summary
The present disclosure relates to the technical field of cutting machining, and discloses a cross-scale structure feature surface machining method based on a multi-component collaborative vibration. A vibration in a z-axis direction is applied to a servo movement mechanism to realize the cutting of a micron-scale structure and the adjustment of the cutting depth; and the vibration in the z-axis direction is applied to a three-axis movement platform to realize the cutting of a millimeter-scale structure and the adjustment of the cutting depth. A required cross-scale structure feature surface can be machined and formed at one time through a collaborative vibration among a vibrating tool, a servo movement mechanism, and/or a three-axis movement platform according to the structure type contained in the required cross-scale structure, which can simplify a process flow and improve the machining efficiency, and has high economic efficiency.