Cross-Section Processing Adjusting Ion Beam Slice Intervals
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Solution Overview
Problem
The increasing miniaturization of semiconductor devices requires more frequent and closer cross-section processing and observation, leading to longer processing times due to the need for smaller slice intervals and more cross-sections, which reduces overall throughput.
Innovation Solution
A cross-section processing and observation method that adjusts slice intervals based on Energy Dispersive X-ray Spectrometry (EDS) measurements, allowing for efficient acquisition of images of both specified and unspecified materials by changing ion beam irradiation conditions, enabling efficient analysis of minute observation targets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the slice interval is reduced and the number of cross-sections is increased to observe minute observation targets, then the observation precision is improved, but the total processing time increases
Solution Approach 1:
The patent dynamically changes the slice interval parameter based on the detected position of observation targets. When a target is detected, the slice interval is reduced to ensure sufficient cross-sections are obtained for analysis. When no target is present, the slice interval is increased to reduce processing time. This adaptive parameter adjustment resolves the contradiction between observation precision and processing time.
Solution Approach 2:
The system performs EDS measurement and target detection automatically during the cross-section processing, using the detected information to self-adjust the slice interval without external intervention. This self-service mechanism enables real-time optimization of processing parameters based on actual sample conditions.
2Productivity
If EDS measurement is performed to detect materials and adjust slice intervals dynamically, then the observation efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent utilizes the EDS measurement capability that is already integrated into the electron microscope system, making it serve dual purposes: both for material analysis and for guiding the cross-section processing. This multi-functionality approach avoids adding separate detection devices, thereby limiting the increase in device complexity while still achieving dynamic optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for rapid and efficient acquisition of cross-section images, even for minute targets, by dynamically adjusting slice intervals and irradiation conditions, thereby improving throughput and enabling detailed analysis.
Implementation Method 1
a cross-section processing step of forming cross-section by irradiating a sample with an ion beam
Implementation Method 2
a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam
Implementation Method 3
Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material is detected
Data Source
AI summary
A cross-section processing and observation method performed by a cross-section processing and observation apparatus comprises a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections. In a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material or of a non-specified material that is different from a pre-specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.