Crucible Support Plate with Contamination Prevention Shield
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Solution Overview
Problem
In deposition processes for organic electroluminescent devices, deposition material adheres to the edge of the hole in the supporting device of the heating crucible, necessitating a separate step for removal, complicating maintenance and use.
Innovation Solution
A supporting device with a contamination prevention plate at the entrance of each hole, featuring an opening portion and a shield portion extending along the inner wall, prevents material adhesion, allowing for easier maintenance and operation by isolating the deposition material from the supporting table.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a heating crucible is arranged in a hole of a supporting device for deposition, then the deposition process can be performed, but deposition material adheres to the edge of the hole requiring separate removal steps
Solution Approach 1:
A contamination prevention plate is introduced as an intermediary component between the supporting device hole and the heating crucible. This plate acts as a mediator that intercepts deposition material before it can adhere to the hole edge, thereby maintaining deposition efficiency while eliminating the need for separate cleaning steps.
Solution Approach 2:
The contamination prevention plate is designed as a disposable or easily replaceable component. Instead of cleaning the entire supporting device, the plate can be simply removed and replaced, significantly reducing maintenance time and effort while maintaining continuous deposition productivity.
2Manufacturing precision
If deposition material is emitted from the heating crucible, then the deposition film can be formed on the substrate, but the deposition material clod adheres to the edge of the hole in the supporting device
Solution Approach 1:
The contamination prevention plate serves as a mediator that separates the deposition material flow from the supporting device hole edge. The plate's positioning and geometry ensure that material clods are directed away from the hole edge, preventing harmful adhesion while maintaining film quality.
Solution Approach 2:
The plate converts the potentially harmful adhesion of deposition material into a beneficial containment effect. By strategically positioning the plate, the material clods that would otherwise adhere to the hole edge are instead contained and directed toward the substrate, improving deposition uniformity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents deposition material adhesion, simplifying maintenance and reducing manufacturing costs and time by allowing for easier cleaning and replacement of the contamination prevention plate, thereby enhancing the efficiency of the deposition process.
Implementation Method 1
the heating crucible 20 is heated through a heat wire 30 installed outside the heating crucible 20 to make the material in the heating crucible 20 vaporized or gasified
Implementation Method 2
The organic material in the heating crucible is vaporized or gasified using the heating crucible to be deposited on the substrate
Implementation Method 3
The organic material in the heating crucible is vaporized or gasified using the heating crucible to be deposited on the substrate
Implementation Method 4
a substrate is arranged in a chamber in which the internal pressure is controlled to be 10−6 through 10−7 torr. An organic material is injected into a heating crucible arranged to face the substrate. The organic material in the heating crucible is vaporized or gasified using the heating crucible to be deposited on the substrate.
Data Source
AI summary
A device for supporting a heating crucible includes a supporting table having an upper surface in which a plurality of holes are formed, and a contamination prevention plate arranged at an entrance of each of the holes of the supporting table and having an opening portion corresponding to the hole and a shield portion extending along an inner wall of the hole.