Cryogenic Interconnects for Superconducting Chip Stacking

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Solution Overview

Problem

The integration of superconducting semiconductor structures into cryogenic chambers for high-performance computing applications is challenging due to the large number of individual chips and limited cryogenic space, leading to inefficiencies in energy efficiency and operational capabilities.

Innovation Solution

The development of cryogenic electronic packages with advanced interconnect structures and semiconductor configurations that include superconducting and conventional metal structures, utilizing under bump metal (UBM) structures and interconnects to maintain critical current capabilities and maximize the number of superconducting structures within a given cryogenic space.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If superconducting semiconductor structures are integrated into cryogenic chambers for high-performance computing, then energy efficiency and operational capabilities are improved, but the large number of individual chips required exceeds the limited cryogenic space available

Engineering Contradiction:
Improveenergy efficiencyVSAvoidcryogenic space
Core Design Contradiction:
Use of energy by moving objectVSVolume of stationary object

Solution Approach 1:

The patent implements multi-chip module assemblies where multiple superconducting semiconductor structures are stacked vertically and interconnected through through-substrate vias. This nesting approach allows numerous chips to occupy a compact three-dimensional volume within the cryogenic chamber, dramatically increasing the number of computational elements that can be housed in limited cryogenic space while maintaining energy efficiency through superconducting interconnects.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent transitions from traditional two-dimensional chip layouts to three-dimensional multi-chip module architectures. By stacking chips vertically and utilizing through-substrate vias for interconnection, the design exploits the third dimension (Z-axis) to pack more computational elements into the same footprint area, effectively increasing density without expanding the horizontal cryogenic chamber footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Power

If the number of individual chips is increased to achieve high-performance computing capabilities, then computational power is improved, but the complexity of integration and assembly increases

Engineering Contradiction:
Improvecomputational powerVSAvoidintegration complexity
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The patent combines multiple superconducting semiconductor structures into integrated multi-chip module assemblies with standardized interconnection schemes. By merging chips into pre-assembled modules with integrated through-substrate vias and interconnect structures, the system reduces the overall integration complexity compared to individually connecting numerous separate chips, while still achieving high computational power through the combined capability of multiple structures.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent divides the high-performance computing system into modular multi-chip module assemblies that can be independently fabricated, tested, and then systematically integrated. This segmentation into manageable modules with standardized interfaces simplifies the overall integration process, making it feasible to assemble complex high-performance systems without being overwhelmed by the complexity of connecting individual chips directly.

Inventive Principle:
Principle #1Segmentation

3Ease of manufacture

If conventional interconnect structures are used in cryogenic packages, then manufacturing is simplified, but critical current capabilities are insufficient for high-performance superconducting computing

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidcritical current capability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent employs composite interconnect structures that combine superconducting materials with conventional materials. The interconnects utilize superconducting traces and through-substrate vias filled with superconducting material, creating composite structures that maintain high critical current capabilities while being integrated into conventional semiconductor fabrication processes. This approach preserves manufacturing simplicity by using established fabrication techniques while upgrading to superconducting materials to achieve the required critical current performance.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent modifies interconnect structure parameters by transitioning from conventional non-superconducting materials to superconducting materials with significantly higher critical current densities. By changing the material parameters (critical temperature, critical current density) of the interconnect structures while maintaining similar geometric configurations and fabrication processes, the system achieves enhanced critical current capability without substantially increasing manufacturing complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the design of high-performance computing circuitry to fit within conventional cryogenic spaces, maintaining critical current capabilities and energy efficiency, while allowing for increased density and operational life of electronic packages.

Implementation Method 1

superconducting technology and superconducting semiconductor structures (e.g., integrated circuits) fabricated using such technology are a leading candidate technology for high performance computing applications (e.g., due to the energy efficiency of superconducting technology)

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Implementation Method 2

integrating the superconducting semiconductor structures and other components of high performance computing circuits into a cryogenic chamber

Methodology Applied
Scientific EffectCryogenic cooling: Cryogenics

Data Source

PatentUS10242968B2Interconnect structure and semiconductor structures for assembly of cryogenic electronic packages
Publication Date: 2019.03.26 MASSACHUSETTS INST OF TECH
  • US10242968B2 patent drawing
  • US10242968B2 patent drawing
  • US10242968B2 patent drawing

AI summary

A cryogenic electronic package includes at least two superconducting and/or conventional metal semiconductor structures. Each of the semiconductor structures includes a substrate and a superconducting trace. Additionally, each of the semiconductor structures includes a passivation layer and one or more under bump metal (UBM) structures. The cryogenic electronic package also includes one or more superconducting and/or conventional metal interconnect structures disposed between selected ones of the at least two superconducting semiconductor structures. The interconnect structures are electrically coupled to respective ones of the UBM structures of the semiconductor structures to form one or more electrical connections between the semiconductor structures. A method of fabricating a cryogenic electronic package is also provided.