Cryogenic Aerosol Cleaning Workpiece Table Tilt
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Solution Overview
Problem
Cryogenic aerosol cleaning in semiconductor manufacturing often results in re-contamination of cleaned surfaces due to particulate dislodged from the workpiece table being redeposited onto the microelectronic workpiece during scanning, particularly at the peripheral edges being redistributed to the center.
Innovation Solution
An apparatus and method involving a treatment chamber with a movable chuck and nozzles to direct a fluid, such as a cryogenic aerosol, onto the microelectronic workpiece, combined with translational and rotational drive systems to scan and rotate the workpiece, ensuring thorough exposure and minimizing re-contamination by controlling the fluid impingement and workpiece movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional scanning techniques are used to move the workpiece through the aerosol jet, then cleaning coverage is achieved, but re-contamination occurs due to particulate redistribution from the workpiece table
Solution Approach 1:
The workpiece table is segmented into multiple zones with different surface orientations. By tilting the table at specific angles (e.g., 45 degrees) during scanning, the surface is divided into regions that are either exposed to or shielded from the aerosol jet, preventing particulate redistribution while maintaining cleaning coverage.
Solution Approach 2:
The workpiece table orientation is dynamically adjusted during the scanning process. The table tilts to specific angles as the workpiece moves through the aerosol jet, creating time-varying surface orientations that prevent particulate redeposition while ensuring thorough cleaning of all surfaces.
2Productivity
If the aerosol jet impinges on the workpiece table during scanning, then cleaning is effective, but particulate on the table is dislodged and transferred to the workpiece surface
Solution Approach 1:
The workpiece table is pre-positioned at specific tilted angles before aerosol jet impingement occurs. This preliminary orientation adjustment ensures that when the aerosol jet strikes the table, particulates are directed away from the workpiece surface rather than onto it, preventing re-contamination before it can occur.
Solution Approach 2:
The aerosol jet impingement on the workpiece table, which initially causes particulate dislodgement, is converted into a beneficial effect by tilting the table. The dislodged particulates are redirected onto the table surface or away from the workpiece, transforming the harmful redeposition effect into a harmless or even beneficial cleaning action on the table itself.
3Manufacturing precision
If the workpiece is scanned through the aerosol jet, then surface treatment is achieved, but peripheral particulate is redistributed to the center
Solution Approach 1:
The workpiece table orientation is dynamically changed during scanning, tilting at different angles as the workpiece moves from peripheral to central regions. This dynamic adjustment prevents particulates from being uniformly redistributed across the surface, maintaining treatment uniformity while avoiding re-contamination.
Solution Approach 2:
Different regions of the workpiece table are given different orientations during scanning. Peripheral regions are tilted at angles that prevent particulate movement toward the center, while central regions maintain orientations optimized for cleaning. This local differentiation of surface properties prevents overall particulate redistribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents re-contamination by ensuring thorough cleaning and minimizing redeposition of particulate, maintaining surface purity during the cleaning process.
Implementation Method 1
cryogenic aerosols have been developed to remove particulate from workpiece surfaces using momentum transfer from the impinging cryogenic aerosol jet
Implementation Method 2
at least one nozzle connected to at least one fluid supply and arranged within the treatment chamber in a manner effective to direct the at least one fluid towards the upper surface of the workpiece
Data Source
AI summary
An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.