Cryogenic Connection Cable Structure for 5-DOF Vacuum Stage Motion

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Solution Overview

Problem

Existing systems face challenges in providing stable electrical and thermal connectivity in ultra-high vacuum environments while allowing precise motion of a sample stage in multiple degrees of freedom, leading to issues such as vibration, mechanical disturbances, and potential short circuits.

Innovation Solution

A connection cable that integrates electrical and thermal conductivity within an outer spring, featuring a braid and inner structural element, designed to maintain shape and enable motion in five degrees of freedom, while preventing contact with chamber components and maintaining ultra-high vacuum conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a rigid cable structure is used to maintain shape and provide electrical/thermal connectivity, then structural stability is improved, but mechanical flexibility and ability to accommodate stage motion in five degrees of freedom deteriorates

Engineering Contradiction:
Improvecable shape stabilityVSAvoidstage motion capability
Core Design Contradiction:
Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The cable is divided into multiple functional segments: an outer spring providing mechanical flexibility and vacuum conductance, a braid for electrical and thermal conductivity, and an inner structural element for shape maintenance. Each segment performs a specific function, allowing the overall cable to accommodate stage motion while maintaining structural integrity and electrical/thermal connectivity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The cable employs a nested structure where the inner structural element is disposed within the braid, and the braid is disposed within the lumen of the outer spring. This nested arrangement allows the cable to maintain its shape while accommodating mechanical deformation and stage motion in five degrees of freedom.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If the cable lumen is sealed to protect internal components, then protection from vacuum environment is improved, but vacuum evacuation and achieving ultra-high vacuum conditions deteriorates

Engineering Contradiction:
Improvecomponent protectionVSAvoidvacuum evacuation capability
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The outer spring acts as a flexible shell that is permeable to vacuum evacuation. The spring's mesh structure allows vacuum pumps to evacuate the lumen and achieve ultra-high vacuum conditions while still providing mechanical protection and flexibility to the internal components.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The outer spring's porous mesh structure enables vacuum conductance paths through which the lumen can be evacuated. This porous design allows the cable to achieve and maintain ultra-high vacuum conditions in the lumen while protecting the internal braid and structural element.

Inventive Principle:
Principle #31Porous materials

3Temperature

If thermal conductivity is increased to maintain cryogenic temperatures, then temperature stability is improved, but electrical insulation and prevention of short circuits deteriorates

Engineering Contradiction:
Improvecryogenic temperature stabilityVSAvoidelectrical insulation
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The braid serves as an intermediary that provides both thermal conductivity for maintaining cryogenic temperatures and electrical conductivity for power transmission. The separate inner structural element and the cable geometry maintain proper spacing and insulation, preventing short circuits while allowing efficient thermal and electrical conduction through the braid.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The cable provides stable cryogenic temperatures and high voltage connections without vibration, ensuring precise sample positioning and imaging, reducing mechanical disturbances and preventing short circuits, suitable for applications like atom probe tomography and quantum computing.

Implementation Method 1

The outer spring includes vacuum conductance paths to enable evacuation of the lumen in a vacuum environment

Methodology Applied
Scientific EffectVacuum conductance: Vacuum

Implementation Method 2

a braid located at least partially within the lumen of the outer spring and configured to conduct high voltage and thermal energy

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

a braid located at least partially within the lumen of the outer spring and configured to conduct high voltage and thermal energy

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20250342985A1Electrical and thermal connection cable for charged particle microscopes
Publication Date: 2025.11.06 FEI CO
  • US20250342985A1 patent drawing
  • US20250342985A1 patent drawing
  • US20250342985A1 patent drawing

AI summary

Systems, methods, and communication cables taught herein provide cryogenic cooling, high voltage connections, and other electrical connections to a sample on a stage within a vacuum environment while still enabling stage motion in at least five degrees of freedom with minimal stage vibration to enable new or improved measurement applications in-situ within the microscope such as atom probe tomography and testing of quantum computing components. The connection cables taught herein combine connections into a single connection cable within an outer spring that is suitable for use in ultra-high vacuum. The connection cables are also shaped and configured to maintain at least a minimum standoff distance from components in the nearby environment (e.g., chamber walls and other equipment) to prevent mechanical, electrical, and thermal shortcutting.