Cryogenic Electrical Connector Structure for Vacuum-Sealed Chucking

Solution Overview

Problem

Operating a substrate support assembly at cryogenic temperatures poses challenges due to expansion and contraction issues leading to fluid leakage, vacuum leaks, and arcing, which complicates electrical connections and heating/voltage provision.

Innovation Solution

A substrate support assembly with an electrical connector that includes dielectric interface bodies and conductive electrical unions, featuring a seal groove and protruding sidewalls to maintain isolation and prevent arcing, while allowing electrical connections to function reliably at cryogenic temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If electrical connections are provided to heaters and voltage for chucking within the substrate support assembly at cryogenic temperatures, then the substrate support assembly can operate at cryogenic temperatures for improved etching selectivity and throughput, but expansion and contraction between layers can cause leakage of fluids and vacuum leaks, and arcing can occur within the assembly

Engineering Contradiction:

ImprovethroughputVSAvoidvacuum seal integrity

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The electrical connector is divided into multiple interface bodies (first interface body, second interface body, third interface body) that are coupled together. This segmentation allows each interface body to independently accommodate thermal expansion and contraction, preventing vacuum leaks while maintaining electrical connectivity at cryogenic temperatures

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The second interface body acts as an intermediary between the first and third interface bodies. It includes protruding sidewalls that extend into the first interface body to provide electrical isolation between conductive elements, preventing arcing while allowing the connector to function at cryogenic temperatures

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If electrical connections are provided to heaters and voltage for chucking within the substrate support assembly at cryogenic temperatures, then the substrate support assembly can operate at cryogenic temperatures for improved etching selectivity and throughput, but expansion and contraction between layers can cause leakage of fluids and vacuum leaks

Engineering Contradiction:

ImprovethroughputVSAvoidfluid leakage

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The electrical connector is divided into multiple interface bodies (first interface body, second interface body, third interface body) that are coupled together. This segmentation allows each interface body to independently accommodate thermal expansion and contraction, preventing vacuum leaks while maintaining electrical connectivity at cryogenic temperatures

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The interface bodies incorporate flexible sealing structures including an O-ring seal that can accommodate thermal expansion and contraction. The seal groove in the third interface body receives the O-ring seal, allowing it to flex and maintain sealing integrity during temperature cycling

Inventive Principle:

Principle #30Flexible shells and thin films

3Productivity

If electrical connections are provided to heaters and voltage for chucking within the substrate support assembly at cryogenic temperatures, then the substrate support assembly can operate at cryogenic temperatures for improved etching selectivity and throughput, but arcing can occur within the assembly

Engineering Contradiction:

ImprovethroughputVSAvoidarcing

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The second interface body acts as an intermediary between the first and third interface bodies. It includes protruding sidewalls that extend into the first interface body to provide electrical isolation between conductive elements, preventing arcing while allowing the connector to function at cryogenic temperatures

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

Different regions of the electrical connector have different properties: the second interface body is made of a first dielectric material while the first and third interface bodies are made of a second dielectric material. This local differentiation optimizes electrical isolation and prevents arcing in critical areas

Inventive Principle:

Principle #3Local quality

4Productivity

If electrical connections are provided to heaters and voltage for chucking within the substrate support assembly at cryogenic temperatures, then the substrate support assembly can operate at cryogenic temperatures for improved etching selectivity and throughput, but expansion and contraction between layers can cause leakage of fluids and vacuum leaks

Engineering Contradiction:

ImprovethroughputVSAvoidstructural stability

Core Design Contradiction:

ProductivityVSStability of the object's composition

Solution Approach 1:

The electrical connector is divided into multiple interface bodies (first interface body, second interface body, third interface body) that are coupled together. This segmentation allows each interface body to independently accommodate thermal expansion and contraction, preventing vacuum leaks while maintaining electrical connectivity at cryogenic temperatures

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The connector design accounts for parameter changes during temperature cycling by incorporating features that accommodate thermal expansion and contraction. The multi-interface body structure allows each section to respond independently to temperature changes, maintaining structural stability

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The electrical connector ensures reliable electrical connections and vacuum sealing, preventing arcing and fluid leakage, even at extreme temperatures, thus supporting stable cryogenic processing of substrates.

Implementation Method 1

Each of the first interface body and the second interface body comprise a plurality of electrical terminals disposed in sockets formed in the respective first and second interface bodies

Methodology Applied

Scientific EffectElectrical insulation: Dielectric

Implementation Method 2

The third interface body includes an O-ring groove formed in a bottom surface thereof

Methodology Applied

Scientific EffectVacuum sealing:

Data Source

PatentUS12444585B2Electrical connector for cooled substrate support assembly

Publication Date: 2025.10.14 APPLIED MATERIALS INC

AI summary

An electrical connector for a substrate support assembly is disclosed herein. The electrical connector includes a first interface body, and a second interface body coupled to the first interface body and to a third interface body. The second interface body is circumscribed by the third interface body. The first interface body and the second interface body each comprise a plurality of electrical terminals disposed in sockets formed in the respective first and second interface bodies, each electrical terminal disposed in sockets of the first interface body coupled to a respective one of the electrical terminals disposed in sockets of the second interface body to form a plurality of isolated conductive electrical unions, wherein the second interface body includes a plurality of protruding sidewalls that extend into the first interface body between each of the electrical terminals of the first interface body.