Cryogenic micro-zone electrostatic chuck connector assembly

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional electrostatic chucks in cryogenic applications experience condensation and electrical failures due to condensation forming on electrical connectors, leading to corrosion and shorts, which compromise the reliability and service life of the substrate support assembly.

Innovation Solution

A cryogenic micro-zone connection assembly with a micro-zone connector, flange, and wiring harness that extends through a flange and socket connection, allowing for electrical connections across vacuum and atmospheric pressures while preventing condensation, using materials and designs that maintain electrical integrity at cryogenic temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional electrical connectors are used in cryogenic applications, then electrical connections can be established across vacuum and atmospheric pressures, but condensation forms on the connectors leading to corrosion and electrical shorts

Engineering Contradiction:

Improveelectrical connection reliabilityVSAvoidcondensation and corrosion

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A vacuum feedthrough is introduced as an intermediary component between the vacuum chamber and atmospheric environment. The feedthrough includes a sealed cavity with a window that allows electrical signals to pass while maintaining vacuum isolation. This mediator prevents direct exposure of electrical connectors to the atmospheric environment where condensation would form, thereby eliminating the harmful effect while preserving electrical connectivity.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrical connection system is segmented into distinct vacuum-isolated and atmospheric portions. The vacuum feedthrough creates a boundary that separates the vacuum chamber environment from the atmospheric environment, allowing electrical connectors to be positioned in the vacuum-isolated section while still enabling signal transmission to external equipment. This segmentation prevents condensation from affecting the electrical connections.

Inventive Principle:

Principle #1Segmentation

2Use of energy by moving object

If electrical connectors are exposed to both vacuum and atmospheric pressure zones, then power can be transmitted to heaters and electrodes, but the connectors are subject to condensation and ice formation at cryogenic temperatures

Engineering Contradiction:

Improvepower transmission to heaters and electrodesVSAvoidcryogenic temperature effects on connectors

Core Design Contradiction:

Use of energy by moving objectVSTemperature

Solution Approach 1:

The vacuum feedthrough acts as a thermal and pressure intermediary, isolating the electrical connectors from the full impact of cryogenic temperatures in the atmospheric environment. The sealed cavity and window structure allow electrical power to be transmitted to heaters and electrodes while preventing the formation of ice and condensation on the connectors themselves.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of operation

If conventional substrate support assembly design is used, then substrate processing can be performed, but the assembly requires numerous electrical connectors (150 or more) that increase complexity and failure points

Engineering Contradiction:

Improvesubstrate processing capabilityVSAvoidnumber of electrical connectors

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

Multiple electrical connections are merged into a single vacuum feedthrough assembly. Instead of having numerous individual connectors penetrating the vacuum chamber wall, the feedthrough integrates multiple electrical signal paths through a single sealed structure with a window, thereby reducing the number of discrete connector components while maintaining full substrate processing capability.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution minimizes condensation-related failures, enhancing the reliability and service life of the substrate support assembly by preventing electrical shorts and corrosion, ensuring consistent operation at cryogenic temperatures.

Implementation Method 1

A bonding film is disposed between the electrostatic chuck and the cooling plate. The bonding film includes a bonding layer comprising a silicone material.

Methodology Applied

Scientific EffectAdhesion: Adhesive

Implementation Method 2

The cooling plate can be cooled to temperatures of less than 0° C., such as from about −10° C. to about −100° C. or lower.

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

processing chambers that utilize electrostatic chucks to secure a substrate being processed within the chamber

Methodology Applied

Scientific EffectElectrostatic attraction: Electrostatics

Data Source

PatentUS20250305750A1Cryogenic micro-zone electrostatic chuck connector assembly

Publication Date: 2025.10.02 APPLIED MATERIALS INC

AI summary

Embodiments of the present disclosure generally relate to a cryogenic micro-zone connection assembly for a substrate support assembly suitable for use in cryogenic applications. In one or more embodiments, the cryogenic micro-zone connection assembly has a first end having a micro-zone connector. A second end having a socket connection. A flange disposed between the micro-zone connector and the socket connection. And a wiring harness coupled at the first end to the micro-zone connector, extending through the flange and coupled at the second end to the socket connection.