Cryogenic Insulating System With Spring-Loaded Extenders
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Solution Overview
Problem
In semiconductor processing systems, the connection between components at cryogenic temperatures leads to thermal contraction, increasing the likelihood of arcing due to changes in pressure, which existing systems fail to adequately address.
Innovation Solution
An insulating system with a housing and insulating extenders, such as spring-loaded pistons or bellows, is placed between components to accommodate dimensional changes and increase the arc path, reducing the possibility and energy of arcing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If components are connected directly without insulation at cryogenic temperatures, then electrical connection is simple, but thermal contraction increases gap distance and likelihood of arcing
Solution Approach 1:
An insulating housing with insulating extenders is introduced as an intermediary component between the base and electrostatic chuck. This mediator provides electrical insulation while accommodating thermal contraction through spring-loaded mechanisms, preventing arcing without requiring direct complex insulation between components
Solution Approach 2:
The insulating extenders use spring-loaded pistons that change their compression state in response to temperature changes. As temperature decreases and components contract, the springs compress further, maintaining constant electrical contact pressure and reliable connection despite dimensional changes
2Reliability
If gap distance between components is reduced to prevent arcing, then arc path is shortened, but thermal contraction at cryogenic temperatures increases the gap distance
Solution Approach 1:
The insulating system incorporates dynamic spring-loaded extenders that automatically adjust their position and compression based on thermal contraction. The springs provide continuous force to maintain constant contact pressure between electrical contacts, compensating for dimensional changes caused by cryogenic temperatures
Solution Approach 2:
The system accounts for thermal contraction by using spring mechanisms that can compress and extend in response to temperature changes. The spring-loaded extenders move dynamically to maintain proper contact pressure as components contract at lower temperatures, ensuring stable electrical connection
3Adaptability or versatility
If pressure in chamber is varied for processing, then processing flexibility is improved, but breakdown voltage decreases at certain pressures increasing arc risk
Solution Approach 1:
The insulating extenders extend beyond the housing to provide additional insulation coverage before arcing can occur. This preliminary protective extension creates an extra safety margin that cushions against the increased arc risk that occurs at intermediate pressures during chamber venting or pumping cycles
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The insulating system effectively minimizes arcing across a wide range of temperatures and pressures, ensuring reliable operation by maintaining electrical insulation and preventing damage from arcing.
Implementation Method 1
These extreme cold temperatures cause thermal contraction, such that the width of the gap between the electrostatic chuck and the base changes.
Implementation Method 2
As the pressure within the chamber varies, the probability of arcing changes. As explained by Paschen's Law, the voltage at which an arc occurs, or the breakdown voltage, is a non-linear function of the gas, the gap distance, and the pressure.
Data Source
AI summary
An insulating system to reduce or eliminate the possibility of arcing while the pressure within a chamber is being varied is disclosed. The system is operable at cryogenic temperatures, such that the insulating system is able to accommodate dimensional changes due to thermal contraction. The insulating system, which includes a housing having one or more bores, is disposed between the two components which are to be electrically connected. An electrical contact, which may be spring loaded, passes through the bore and is used to electrically connect the two components. The ends of the electrical contact are surrounded by an insulating extender which extends from the housing. In one embodiment, a spring-loaded piston is used as the insulating extender. This insulating extender compensates for changes in dimension due to thermal contraction and covers the portion of the electrical contact that extends beyond the outer surface of the housing.