Multi-Layer Pipe Insulation for Cryogenic Condensation Control

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Solution Overview

Problem

Existing insulation structures in semiconductor fabrication processes face challenges in preventing dew condensation, reducing damage to insulation layers, and maintaining structural integrity under cryogenic conditions, which can disrupt low-temperature processes.

Innovation Solution

A multi-layer insulation structure comprising a first layer of silica aerogel, a second layer of porous foam, and a third layer of polyurea-based material, each with varying thermal conductivity and hardness, is applied to piping systems to prevent condensation and protect against external impacts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single-layer insulation structure is used, then the device complexity is reduced, but the insulation performance is insufficient and dew condensation cannot be prevented

Engineering Contradiction:
Improveinsulation performanceVSAvoidinsulation structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies composite materials by combining three different insulation layers with distinct properties: a first insulation layer (e.g., polyurethane foam) for base insulation, a second insulation layer (e.g., silica aerogel) with superior thermal insulation properties, and a third insulation layer (e.g., polyethylene foam) for external protection. This multi-material composite structure achieves superior insulation performance and prevents dew condensation while managing the complexity through systematic material selection and layering.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The insulation structure is segmented into three distinct layers, each performing a specific function. The first layer provides base insulation, the second layer (with greater thickness) provides enhanced thermal barrier, and the third layer provides external protection. This segmentation allows each layer to be optimized for its specific role, resulting in overall improved insulation performance and condensation prevention.

Inventive Principle:
Principle #1Segmentation

2Volume of moving object

If the insulation layer is made thinner to reduce space, then the device size is reduced, but the insulation effectiveness decreases and condensation occurs

Engineering Contradiction:
Improveinsulation layer thicknessVSAvoidcondensation prevention
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

By using composite materials with different thermal conductivities across three layers, the structure achieves high insulation effectiveness without requiring excessive thickness. The second layer uses materials with lower thermal conductivity to maximize insulation per unit thickness, while the overall multi-layer configuration provides superior thermal barrier performance compared to a single thick layer.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The insulation structure applies local quality by making the second insulation layer thicker than the first and third layers. This non-uniform thickness distribution places greater insulation capacity where it is most needed (in the middle layer with lowest thermal conductivity materials), optimizing condensation prevention while minimizing total thickness.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If a soft insulation material is used, then the ease of manufacture is improved, but the resistance to external impact is insufficient causing insulation layer damage

Engineering Contradiction:
Improveinsulation material applicationVSAvoidimpact resistance
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The patent combines soft insulation materials in the first and second layers for ease of manufacture and application with a hard third insulation layer for impact resistance. The third layer acts as a protective shell that shields the softer internal layers from external mechanical damage while the softer layers maintain their manufacturing advantages.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The third hard insulation layer serves as a pre-applied protective barrier that cushions and absorbs external impacts before they can reach and damage the softer internal insulation layers. This beforehand protection ensures the insulation structure's integrity is maintained under external mechanical stress.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-layer insulation structure effectively prevents dew condensation, reduces insulation layer damage, and enhances the lifespan of insulation systems by maintaining structural integrity and reducing moisture ingress, thereby ensuring consistent performance in cryogenic environments.

Implementation Method 1

a second insulation layer on an outer surface of the first insulation layer that includes a material different from a material of the first insulation layer

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

The second insulation layer may include a porous foam

Methodology Applied
Scientific EffectPorous foam insulation: Foam

Data Source

PatentUS12398838B2Insulation structure, insulated piping device including the same, and method of fabricating the same
Publication Date: 2025.08.26 SAMSUNG ELECTRONICS CO LTD
  • US12398838B2 patent drawing
  • US12398838B2 patent drawing
  • US12398838B2 patent drawing

AI summary

Insulation structures, insulated piping devices including the same, and methods of fabricating the same are disclosed. The insulation structure includes a first insulation layer on an outer surface of a pipe, a second insulation layer on an outer surface of the first insulation layer that includes a material different from a material of the first insulation layer, and a third insulation layer on an outer surface of the second insulation layer that includes a material different from the material of the second insulation layer. A thickness of the second insulation layer is greater than a thickness of the first insulation layer and a thickness of the third insulation layer. The second insulation layer includes a porous foam.