Cryogenic Sample Stage with Dual-Mode Cooling for Flexible Movement

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing cooled moveable sample stages in scientific instruments face a design dilemma between achieving high heat transfer rates for rapid cooling and maintaining flexibility for movement, as a high heat transfer rate typically requires a stiff braid or foil.

Innovation Solution

Decoupling the initial cooling phase from maintaining the cooled temperature by using a cooling plate in contact with the sample stage in a parked position to achieve high heat transfer rates, and subsequently using a flexible heat transfer connection, such as a thin copper braid, to maintain the target temperature while allowing movement of the sample stage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a thick and stiff braid or foil is used to provide high heat transfer rate, then cooling efficiency is improved, but flexibility and ease of movement deteriorate

Engineering Contradiction:
Improvecooling rateVSAvoidflexibility
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The cooling system is segmented into two distinct components: a cooling plate for high-rate cooling and a flexible braid for maintenance cooling. This segmentation allows each component to be optimized for its specific function, resolving the contradiction between cooling efficiency and flexibility

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The cooling plate performs preliminary action by rapidly cooling the sample stage to the target temperature before the sample stage moves to the imaging position. This preliminary high-rate cooling eliminates the need for a thick flexible braid during movement

Inventive Principle:
Principle #10Preliminary action

2Productivity

If a thick braid or foil is used to achieve high heat transfer rate, then cooling performance is improved, but device complexity increases

Engineering Contradiction:
Improveheat transfer rateVSAvoidstructural complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The thermal connection is segmented into a rigid cooling plate for high heat transfer and a flexible braid for connectivity. This segmentation allows the high heat transfer function to be achieved without requiring the entire connection structure to be thick and complex

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The cooling plate provides localized high heat transfer capability at the parking position, while the flexible braid provides distributed maintenance cooling during movement. This local quality approach optimizes heat transfer where needed without compromising flexibility elsewhere

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables rapid cooling of the sample to a target temperature using a high heat transfer rate and then maintains that temperature at a lower heat transfer rate, allowing for sufficient flexibility in the sample stage movement without interference.

Implementation Method 1

A cooling plate is provided in contact with the sample stage in a parked position of the sample stage to cool the sample stage through the cooling plate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

A thermally conductive flexible member, for example a conductive braid, such as a copper braid, thermally connects the sample holder and the cold finger to cool the sample holder through the thermally conductive flexible member

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

A cold finger is in contact with a heat sink

Methodology Applied
Scientific EffectHeat sink: Heat Sink

Data Source

PatentEP4567858A1Scientific instrument with cryogenic sample stage
Publication Date: 2025.06.11 FEI CO
  • EP4567858A1 patent drawingFigure 1~2
  • EP4567858A1 patent drawingFigure 3~6
  • EP4567858A1 patent drawingFigure 7

AI summary

A scientific instrument, for example an electron microscope, is disclosed and comprises a moveable stage with a sample holder. A cold finger is in contact with a heat sink and comprises a cooling plate configured to contact the sample holder to cool the sample holder in a rapid cooling position. A thermally conductive flexible member thermally connects the sample holder and the cold finger to cool the sample holder away from the rapid cooling position, where the sample can be investigated, imaged, and the like. Embodiments are disclosed in which both the cold and the sample holder move or in which only the cold finger move between a rapid cooling and other configurations. Also disclosed is a corresponding method for operating the scientific instrument. The disclosure advantageously combines rapid cooling in the rapid cooling position with reduced limitation of movement of the sample holder away from the parked position.