Cryogenic Susceptor Connector Assembly for Stable Low-Temperature Power Feed
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Solution Overview
Problem
Conventional susceptors are not designed to operate effectively at cryogenic temperatures, leading to issues such as material deterioration, brittle fracture, and thermal deformation during low-temperature or cryogenic processes, which are necessary for advanced semiconductor manufacturing like 3D NAND flash devices and ultra-fine semiconductor processes.
Innovation Solution
A susceptor design featuring a ceramic plate with an electrode connector assembly that includes a conductive elastomer for stable electrical connection, a soft metal connector rod, and an insulating tube to prevent thermal deformation and condensation, along with a base member and ceramic plate configuration for uniform cooling, enabling operation at temperatures as low as -100°C.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional susceptor materials and structures are used at cryogenic temperatures, then room temperature or high temperature operation is maintained, but material deterioration and brittle fracture occur
Solution Approach 1:
The patent changes the material parameters of the susceptor components to be suitable for cryogenic temperatures. Specifically, it uses a soft metal for the connector rod that maintains flexibility and electrical conductivity at low temperatures, and selects ceramic materials that resist brittle fracture. This parameter change enables the susceptor to operate reliably at temperatures of -100°C or lower without material deterioration.
Solution Approach 2:
The patent employs composite material structures combining different materials with complementary properties. The electrode connector assembly integrates a soft metal connector rod with ceramic insulating tubes and elastomeric sealing materials. This composite approach allows each material to contribute its strengths: the soft metal provides flexibility and conductivity, the ceramic provides thermal and electrical insulation, and the elastomer provides sealing, collectively preventing brittle fracture and material deterioration at cryogenic temperatures.
2Reliability
If conventional susceptor structures are used at cryogenic temperatures, then simple design is maintained, but thermal deformation and condensation occur
Solution Approach 1:
The patent segments the electrode connector assembly into distinct functional components: a connector rod for electrical connection, an insulating tube for thermal and electrical isolation, and elastomeric sealing elements for condensation prevention. This segmentation allows each component to be optimized for its specific function while working together to prevent thermal deformation and condensation at cryogenic temperatures.
Solution Approach 2:
The patent introduces intermediary components between the electrical connector and the external environment. The insulating tube acts as a thermal and electrical intermediary, blocking heat transfer and electrical interference. The elastomeric sealing material serves as an intermediary barrier preventing condensation formation. These intermediaries protect the electrical connection from cryogenic environmental effects without requiring complete redesign of the entire susceptor structure.
3Reliability
If standard connector materials are used, then ease of manufacture is maintained, but electrical connectivity becomes unstable due to material deterioration
Solution Approach 1:
The patent changes the material parameters of the connector rod from standard rigid metals to soft metals that maintain their mechanical and electrical properties at cryogenic temperatures. The soft metal特性 allows the connector to accommodate thermal contraction and maintain stable electrical contact without becoming brittle. This parameter change ensures stable electrical connectivity while remaining manufacturable through conventional metalworking processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The susceptor assembly ensures stable operation and prevents material deterioration, maintaining electrical connectivity and preventing thermal deformation or condensation at cryogenic temperatures, thus addressing the challenges of microbridge and polymer bottleneck phenomena in semiconductor manufacturing.
Implementation Method 1
a conductive elastomer filled between the first connector terminal and the electrode, and the first connector terminal and the electrode may be electrically connected to each other by the conductive elastomer
Implementation Method 2
an insulating tube surrounding the first connector terminal, the connector rod, and the second connector terminal
Implementation Method 3
an insulating tube surrounding the first connector terminal, the connector rod, and the second connector terminal... operates stably without thermal deformation or condensation in a low-temperature or cryogenic environment
Data Source
AI summary
Disclosed is a susceptor which can operate with durability, even at a low or cryogenic temperature. The present invention provides a susceptor characterized by comprising: a base member; a ceramic plate having electrodes on the base member; and an electrode connector assembly for applying power to the electrodes of the ceramic plate through the base member. The electrode connector assembly comprises: a first connector terminal which is the end in contact with the electrodes; a second connector terminal which is the end where power is input; and a connector rod connecting the first connector terminal and the second connector terminal.