Cryopump Compressor Frequency Control

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Solution Overview

Problem

Existing cryopump systems do not efficiently manage power consumption by maintaining optimal operating frequencies based on temperature changes in the second stage part, leading to inefficient energy use.

Innovation Solution

A cryopump system that includes a temperature measuring unit, monitoring unit, and controller to incrementally increase the compressor's operating frequency when the second stage part reaches a predetermined temperature, reducing power consumption by setting initial frequencies lower than maximum and adjusting as needed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the compressor operates at maximum operating frequency from the initial stage of cooling, then the cooling speed is improved, but power consumption increases

Engineering Contradiction:
Improvecooling speedVSAvoidpower consumption
Core Design Contradiction:
SpeedVSUse of energy by moving object

Solution Approach 1:

The compressor's operating frequency is dynamically adjusted based on the real-time temperature of the second stage part. The controller increments the operating frequency only when the temperature reaches a predetermined reference temperature, transitioning from a static maximum frequency operation to a dynamic adaptive operation that matches actual cooling needs.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system changes the operating parameter (frequency) of the compressor based on temperature conditions. Instead of maintaining a constant maximum frequency, the frequency is modified incrementally in response to temperature measurements, optimizing the balance between cooling performance and energy consumption.

Inventive Principle:
Principle #35Parameter changes

2Power

If the compressor operating frequency is increased incrementally, then cooling capacity is maintained, but power consumption is reduced

Engineering Contradiction:
Improvecooling capacityVSAvoidpower consumption
Core Design Contradiction:
PowerVSUse of energy by moving object

Solution Approach 1:

The system implements a feedback control mechanism where the temperature of the second stage part is continuously measured and fed back to the controller. Based on this feedback, the controller decides whether to increment the compressor's operating frequency, creating a closed-loop control system that maintains cooling capacity while optimizing power consumption.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

Instead of always operating at maximum capacity, the system applies partial action by running the compressor at lower frequencies when the temperature threshold is not met. The frequency is increased incrementally only when necessary, avoiding excessive energy consumption while maintaining sufficient cooling capacity.

Inventive Principle:
Principle #16Partial or excessive action

3Use of energy by moving object

If the initial operating frequency is set low, then power consumption is reduced, but cooling speed decreases

Engineering Contradiction:
Improvepower consumptionVSAvoidcooling speed
Core Design Contradiction:
Use of energy by moving objectVSSpeed

Solution Approach 1:

The system takes preliminary action by setting the compressor to a low initial operating frequency at the start of operation. This preliminary low-power state is maintained until the temperature condition triggers an frequency increment, allowing the system to benefit from reduced power consumption during periods when full cooling capacity is not yet required.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system reduces power consumption by maintaining optimal operating frequencies, improving cooling capacity while minimizing energy use without affecting exhaust rates.

Implementation Method 1

a compressor configured to supply a high-pressure helium refrigerant to the cryopump

Methodology Applied
Scientific EffectCompression: Compression

Implementation Method 2

a refrigerant evaporates in the evaporator to create a cryogenic environment

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 3

a cooling process to achieve cryogenic typically includes a compressor, a condenser, an expander, and an evaporator

Methodology Applied
Scientific EffectAdiabatic cooling: Adiabatic Cooling

Data Source

PatentUS20250207573A1Cryopump system
Publication Date: 2025.06.26 CRYO H&I INC
  • US20250207573A1 patent drawing
  • US20250207573A1 patent drawing
  • US20250207573A1 patent drawing

AI summary

A cryopump system including a cryopump and a compressor configured to supply a high-pressure helium refrigerant to the cryopump includes a temperature measuring unit configured to measure a temperature of a second stage part among a first stage part and the second stage part of the cryopump, a monitoring unit configured to monitor whether the temperature of the second stage part reaches a predetermined second reference temperature, and a controller configured to incrementally increase an operating frequency of the compressor whenever the temperature of the second stage part reaches the predetermined second reference temperature.