Cryopump system, method of operating the same, and compressor unit
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Solution Overview
Problem
Cryopump systems require a wide range of working gas flow rates to efficiently operate large cryopumps or multiple cryopumps, but existing compressor units have limited capacity control ranges, restricting the achievable flow rate variability.
Innovation Solution
A cryopump system with a compressor unit that includes a gas quantity adjustment unit and a control device to switch the working gas quantity between different flow rates, allowing for expanded flow rate control by adjusting the operation frequency, thereby extending the flow rate range beyond the compressor's original limitations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the capacity of the helium compressor is changed by controlling the rotational speed of the variable speed motor, then the compressor capacity can be adjusted within the motor's specification range, but the flow rate control range is limited and cannot provide a wide enough range for large or multiple cryopumps
Solution Approach 1:
The gas line is divided into multiple parallel channels (first gas line and second gas line), each capable of transporting working gas independently. By selectively opening or closing valves in different channels, the system can provide different flow rates, thereby expanding the overall flow rate control range beyond what a single compressor channel can achieve.
Solution Approach 2:
The system dynamically switches between different gas line configurations based on the required flow rate. The control device adjusts which gas lines are active and how the compressor operates, enabling the system to adapt to varying flow rate demands for different cryopump configurations.
2Power
If the working gas quantity in the gas line is increased to provide higher flow rates for large cryopumps, then the refrigerating capacity can be increased, but the electric power consumption increases and energy efficiency decreases
Solution Approach 1:
Instead of always operating the compressor at full capacity, the system uses only the necessary portion of the compressor's capability by selectively activating specific gas lines. This partial action approach ensures that the compressor operates at optimal efficiency points while meeting the actual refrigerating demand, avoiding excessive power consumption.
Solution Approach 2:
The system changes operational parameters by switching between different gas line configurations and compressor operating modes. This allows the system to match the refrigerating capacity to the actual load requirements, optimizing energy efficiency across different operating conditions.
Data Source
AI summary
A cryopump system includes a cryopump, a compressor of a working gas for the cryopump, a control device configured to control an operation frequency of the compressor, a gas line connecting the cryopump and the compressor, and a gas quantity adjustment unit configured to switch a working gas quantity of the gas line between at least a first gas quantity and a second gas quantity. When the gas line has the first gas quantity, a controllable range of the operation frequency provides a first flow rate range of the working gas. When the gas line has the second gas quantity, the controllable range provides a second flow rate range of the working gas. The second flow rate range has a non-overlapping portion with the first flow rate range.