Cryopump Compressor Pressure Ratio Optimization
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Solution Overview
Problem
Cryopump systems often consume excessive power due to operating pressure ratios outside the optimal range, leading to inefficient energy use and imbalance in working gas flow rates between compressor and refrigerator.
Innovation Solution
A cryopump system with a two-stage refrigerator and a variable-frequency compressor unit, operating within a pressure ratio range of 1.6 to 2.5 to maximize refrigeration efficiency and balance gas flow rates, thereby reducing power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the compressor unit operates outside the optimal pressure ratio range, then the refrigerating capacity can be maintained, but the power consumption increases excessively
Solution Approach 1:
The patent applies parameter changes by optimizing the pressure ratio parameter of the compressor unit to a specific range (1.05 ≤ pressure ratio < 1.3). This parameter optimization resolves the contradiction by achieving the refrigerating capacity requirement while minimizing power consumption. The control unit continuously monitors and adjusts the compressor operating parameters to maintain optimal efficiency.
Solution Approach 2:
The patent implements feedback control through a control unit that monitors the actual pressure ratio, refrigerating capacity, and power consumption in real-time. Based on this feedback, the control unit adjusts the compressor operating frequency and pressure ratio to maintain optimal operation, thereby resolving the contradiction between maintaining refrigerating capacity and reducing power consumption.
2Use of energy by moving object
If the pressure ratio is optimized to save energy, then power consumption decreases, but the working gas flow rate balance between compressor and refrigerator becomes difficult to maintain
Solution Approach 1:
The control unit continuously monitors both the pressure ratio and the working gas flow rates between the compressor and refrigerator. When the pressure ratio is adjusted to optimize energy consumption, the feedback mechanism detects any imbalance in gas flow rates and makes real-time adjustments to restore balance, thereby resolving the contradiction between energy saving and operational balance.
Solution Approach 2:
The patent employs dynamic adjustment of the compressor operating frequency and pressure ratio based on real-time system conditions. This dynamic control allows the system to maintain optimal energy efficiency while automatically adapting to maintain working gas flow rate balance, resolving the contradiction between fixed optimization and operational flexibility.
3Quantity of substance
If the compressor operating frequency is increased to supply more working gas, then the gas flow rate increases, but the pressure ratio moves away from the optimal range increasing power consumption
Solution Approach 1:
The patent uses dynamic frequency conversion technology to independently control the compressor's operating frequency and pressure ratio. When increased gas flow is required, the system dynamically adjusts both parameters in coordination, ensuring the pressure ratio remains within the optimal range (1.05 ≤ pressure ratio < 1.3) while achieving the required gas flow rate, thus resolving the contradiction between quantity and energy consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves improved energy saving performance by optimizing refrigeration efficiency and balancing gas flow, preventing excessive power consumption and maintaining refrigerating capacity.
Implementation Method 1
The working gas expands in the refrigerator and cools the cryopump accordingly
Implementation Method 2
a compressor unit including a compressor main body that compresses a working gas to be supplied to the refrigerator
Data Source
AI summary
A cryopump system includes at least one cryopump including a refrigerator including a low temperature cooling stage and a high temperature cooling stage, a low temperature cryopanel cooled by the low temperature cooling stage, and a high temperature cryopanel cooled by the high temperature cooling stage. A compressor unit includes a compressor main body that compresses a working gas supplied to the refrigerator, an operating frequency of the compressor main body being variable. The compressor unit is operated such that a pressure ratio between high pressure and low pressure of the compressor main body is in a range between 1.6 and 2.5.


