Cryopump Cooler Speed Control for Power Reduction
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Solution Overview
Problem
Existing cryopump systems do not efficiently monitor and adjust the motor rotational speed of coolers based on temperature changes, leading to suboptimal power consumption and performance.
Innovation Solution
A cryopump system that includes a temperature measurement unit, a monitoring unit, and a controller to measure and monitor the temperatures of the first and second stage parts, and gradually increase the motor rotational speed of the cooler when the second stage part reaches a predetermined temperature, thereby reducing power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the motor rotational speed of the cooler is increased to maintain cryogenic temperature, then the cooling performance is improved, but the power consumption increases
Solution Approach 1:
The motor rotational speed of the cooler is dynamically adjusted based on real-time temperature measurements from the second stage part. The controller increases the rotational speed only when the temperature approaches the reference value, and decreases it when the temperature is sufficient, transforming the static high-speed operation into a dynamic adaptive control system that balances cooling performance and energy consumption.
Solution Approach 2:
A feedback control mechanism is implemented where the temperature measurement unit continuously monitors the second stage part temperature, the monitoring unit compares it with the reference temperature, and the controller adjusts the motor rotational speed accordingly. This closed-loop feedback system ensures the cooler operates at optimal speed to maintain cryogenic temperature while minimizing power consumption.
2Measurement precision
If the motor rotational speed is increased to cool the second stage part, then the temperature control accuracy is improved, but the device complexity increases
Solution Approach 1:
The temperature monitoring and control function is segmented and localized to the second stage part specifically. The temperature measurement unit, monitoring unit, and controller work together to manage only the critical second stage part temperature, rather than controlling the entire cryopump system uniformly. This segmentation achieves precise temperature control where needed while keeping the overall control strategy relatively simple.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces power consumption by gradually increasing the motor rotational speed of the cooler as the temperature increases, while maintaining the performance of the cryopump.
Implementation Method 1
a temperature measurement unit configured to measure temperatures of a first stage part and a second stage part of a cryopump, respectively
Implementation Method 2
Cryogenic cooling is widely used in industrial fields such as semiconductor manufacturing and testing. Herein, cryogenic temperatures refer to temperatures below −200° C.
Implementation Method 3
a cooling process to achieve cryogenic temperatures is performed typically using a compressor, a condenser, an expander, and an evaporator in which a refrigerant evaporates to create a cryogenic environment
Implementation Method 4
a first heater configured to heat the first stage part
Data Source
AI summary
A cryopump system includes a temperature measurement unit configured to measure temperatures of a first stage part and a second stage part of a cryopump, respectively, a monitoring unit configured to monitor whether the temperature of the second stage part reaches a predetermined second reference temperature and a controller configured to gradually increase a motor rotational speed of a cooler of the cryopump whenever the temperature of the second stage part reaches the predetermined second reference temperature.