Cryopump Regeneration Water Discharge Method
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Solution Overview
Problem
Conventional cryopump regeneration methods are inefficient in discharging ice condensed water, as it requires temperatures above 273 K to melt ice, which is difficult to achieve, leading to prolonged regeneration times and incomplete water discharge.
Innovation Solution
A three-stage water regeneration method involving temperature increase to melt ice, vaporization of water at a controlled pressure to prevent freezing, and evacuation of water vapor, allowing efficient discharge of water in solid, liquid, and gas states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If temperature is increased to melt ice (above 273 K), then ice can be discharged, but it is difficult to achieve due to cryopump structure constraints
Solution Approach 1:
The patent segments the ice discharge process into three distinct stages: (1) melting stage where temperature is increased to melt ice, (2) vaporization stage where pressure is reduced to vaporize water, and (3) discharge stage where water vapor is evacuated. This segmentation allows each stage to operate under optimized conditions without requiring the entire system to withstand extreme temperatures, thus resolving the contradiction between achieving ice discharge and maintaining structural integrity.
Solution Approach 2:
The patent dynamically changes operating parameters (temperature and pressure) according to the discharge stage. During the melting stage, temperature is increased while pressure is maintained. During the vaporization stage, pressure is reduced to facilitate water vaporization at lower temperatures. This parameter adjustment allows ice discharge without requiring the structure to continuously withstand high temperatures, resolving the technical contradiction.
2Productivity
If conventional regeneration methods are used, then regeneration process can be performed, but regeneration time is prolonged and water discharge is incomplete
Solution Approach 1:
The patent utilizes phase transitions of water (solid→liquid→vapor) as the core mechanism for ice discharge. By controlling temperature and pressure to facilitate each phase transition in sequence, the system efficiently transforms ice into water vapor for discharge. This approach is significantly more efficient than conventional methods that rely solely on temperature increase or purge gas flow, thereby reducing regeneration time and improving productivity.
Solution Approach 2:
The patent implements a periodic regeneration cycle with distinct phases: melting phase, vaporization phase, and discharge phase. Each phase is executed in sequence with optimized duration and parameters. This periodic action ensures complete water discharge while minimizing total regeneration time, resolving the contradiction between regeneration efficiency and time loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method efficiently regenerates water by melting ice, vaporizing it at a suitable pressure, and discharging water vapor, significantly reducing regeneration time and ensuring complete discharge.
Implementation Method 1
a temperature increasing step for melting the ice
Implementation Method 2
melting the ice
Implementation Method 3
a vaporizing step for vaporizing water
Implementation Method 4
vaporization of water at a controlled pressure to prevent freezing
Implementation Method 5
a discharging step for discharging water vapor
Data Source
AI summary
Ice condensed in a portion in a case in which a cryogenic refrigerator is installed, which is cooled by the cryogenic refrigerator, is melted by increasing a temperature of the ice to a melting point of the ice or higher. Then, while the temperature of the melted ice and a pressure thereof are kept to be equal to or higher than a freezing point of water, the pressure is reduced by rough evacuation so as to vaporize water. At a time at which the water is discharged, the pressure is further reduced so as to discharge water vapor. In this manner, regeneration of water is performed in accordance with a state of the water (i.e., a solid state, a liquid state, and a gas state), thereby shortening a regeneration time.