Cryopump Regeneration Control via Pressure Drop Monitoring
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Solution Overview
Problem
Cryopump regeneration times are lengthy, necessitating a method to shorten the process while ensuring effective discharge of condensate and adsorbed materials.
Innovation Solution
A cryopump system with a regeneration control unit that computes and monitors pressure drop rates during rough pumping, using this data to control the discharge process, including temperature management and alternating rough pumping and purge operations to efficiently vaporize and discharge condensate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If conventional regeneration process is used, then condensate can be discharged, but regeneration time becomes lengthy
Solution Approach 1:
The system continuously monitors pressure drop rate during rough pumping and uses this feedback to detect phase transition of condensate. When the pressure drop rate decreases below a threshold, indicating phase transition, the control unit automatically switches from rough pumping to purging mode, optimizing the regeneration process timing and reducing overall regeneration time.
Solution Approach 2:
The regeneration process dynamically switches between two distinct pumping modes (rough pumping and purging) based on real-time pressure drop rate measurements. This dynamic adaptation allows the system to efficiently handle different phases of condensate discharge, significantly reducing total regeneration time compared to static conventional processes.
2Reliability
If rough pumping is performed to discharge condensate, then vacuum level is maintained, but pressure drop rate decreases during phase transition
Solution Approach 1:
The system performs periodic switching between rough pumping and purging operations. During each cycle, rough pumping maintains vacuum while purging removes accumulated condensate. This periodic action prevents condensate buildup that would otherwise interfere with pressure measurements, ensuring reliable detection throughout the regeneration process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for a significant reduction in cryopump regeneration time by effectively managing pressure drop rates and phase transitions, ensuring complete discharge of condensate and adsorbed materials.
Implementation Method 1
rough pumping of the cryopump is performed, the discharge process discharging condensate from the cryopump
Implementation Method 2
a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump
Implementation Method 3
A cryopump is a vacuum pump that traps and exhausts gas molecules by means of condensation or adsorption onto a cryogenically chilled cryopanel
Implementation Method 4
A cryopump is a vacuum pump that traps and exhausts gas molecules by means of condensation or adsorption onto a cryogenically chilled cryopanel
Data Source
AI summary
A cryopump system includes a cryopump, and a regeneration control unit that controls the cryopump according to a regeneration sequence including a discharge process of rough pumping the cryopump to discharge condensate from it. The regeneration control unit includes a pressure drop rate computation unit that computes a pressure drop rate for the cryopump during the rough pumping of the cryopump, and a pressure drop rate monitoring unit that detects diminishment in the pressure drop rate during the rough pumping.