Cryopump Vibration-Proof Structure with Removable Restraint
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Solution Overview
Problem
Cryopumps face challenges in minimizing vibration transmission from cryocoolers, which can affect the quality of vacuum processes and risk damage during transportation due to deformation of vibration-proof structures under loads or impacts.
Innovation Solution
A cryopump design incorporating a vibration-proof structure with a removable restraint that connects the cryocooler to the cryopump vacuum chamber, using materials like rubber for vibration isolation and a high-stiffness restraint to prevent expansion and contraction deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a vibration-proof structure is used to connect the cryocooler to the cryopump vacuum chamber, then vibration transmission to the vacuum processing device is reduced, but the structure becomes vulnerable to deformation under loads or impacts during transportation
Solution Approach 1:
The restraint is designed to be removable, allowing the connection structure to dynamically adapt between two states: during transportation, the restraint is attached to provide rigid support and prevent deformation; during operation, the restraint is removed to allow the vibration-proof structure to function effectively. This dynamic configuration resolves the contradiction between vibration isolation and transportation protection.
Solution Approach 2:
The connection system is segmented into multiple functional components: the vibration-proof structure (for vibration isolation during operation) and the removable restraint (for structural protection during transportation). This segmentation allows each component to specialize in its intended function without compromising the other, addressing both vibration transmission and structural integrity requirements.
2Reliability
If the cryocooler is connected rigidly to the cryopump vacuum chamber, then structural stability during transportation is improved, but vibration generated by the cryocooler is transmitted to the vacuum processing device
Solution Approach 1:
The connection system transitions between rigid (restraint attached) and flexible (restraint removed) states based on operational requirements. During transportation, the rigid connection provides structural stability; during operation, the flexible vibration-proof connection isolates vibrations. This dynamic adaptability resolves the contradiction between structural stability and vibration transmission.
Solution Approach 2:
The removable restraint acts as an intermediary that temporarily reinforces the connection during transportation, while allowing the vibration-proof structure to mediate vibration isolation during operation. This intermediary element enables the system to achieve both rigid stability and flexible vibration isolation as needed.
3Reliability
If a removable restraint is added to restrain expansion and contraction of the vibration-proof structure, then protection during transportation is improved, but device complexity increases
Solution Approach 1:
The restraint is designed as a temporary, removable component that is attached only when needed (during transportation) and removed when not needed (during operation). This approach provides protection during critical phases without permanently increasing device complexity, as the restraint can be discarded after its protective function is fulfilled.
Solution Approach 2:
The restraint is designed as a simple, inexpensive component that serves its protective function temporarily and can be easily removed or replaced. This disposable-like approach provides necessary protection during transportation without committing to a complex permanent structural modification.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively reduces vibration transmission to vacuum processing devices and protects the cryopump from damage during transportation by restraining deformation of the vibration-proof structure.
Implementation Method 1
a vibration-proof structure that connects the cryocooler to the cryopump vacuum chamber
Implementation Method 2
using materials like rubber for vibration isolation
Implementation Method 3
a removable restraint that connects the cryocooler to the cryopump vacuum chamber in parallel to the vibration-proof structure and restrains both of expansion and contraction of the vibration-proof structure
Data Source
AI summary
A cryopump includes: a cryopump vacuum chamber; a cryocooler; a vibration-proof structure that connects the cryocooler to the cryopump vacuum chamber; and a removable restraint that connects the cryocooler to the cryopump vacuum chamber in parallel to the vibration-proof structure and restrains both of expansion and contraction of the vibration-proof structure between the cryocooler and the cryopump vacuum chamber.