Single Crystal Diameter Control via Melt Sinking Speed

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Solution Overview

Problem

Current methods for determining the diameter of a single crystal during the Czochralski process, especially in the end cone region, are inefficient due to the need for camera adjustments or additional components like mirrors, leading to material waste and potential dislocations in the crystal.

Innovation Solution

A method that calculates the single crystal diameter by considering the first sinking speed of the melt, first lifting speed, mass conservation, and density differences between liquid and solid materials, allowing for precise control of the end cone formation without the need for camera adjustments or additional components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a camera is positioned outside the pulling device to measure the single crystal diameter, then the measurement can be performed, but the camera cannot capture the end cone region due to the steep angle requirement

Engineering Contradiction:
Improvediameter measurement capabilityVSAvoidend cone measurement accessibility
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent introduces a mirror positioned above the melt surface to redirect the optical path, allowing the camera to capture the end cone region from a different angular dimension without physically repositioning the camera inside the high-temperature zone

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If a mirror is added to enable end cone diameter measurement, then measurement capability is improved, but the device complexity increases and the mirror fogs up easily

Engineering Contradiction:
Improveend cone diameter measurementVSAvoidadditional mirror component
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent employs a simple, easily replaceable mirror that can be quickly changed if it fogs up, treating it as a consumable component rather than a permanent fixture, thereby reducing the impact of its limitations on overall system complexity

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The mirror serves as an intermediary optical element that enables measurement without requiring direct line-of-sight access to the end cone region, mediating between the camera and the measurement target

Inventive Principle:
Principle #24Intermediary (Mediator)

3Loss of substance

If the end cone is drawn with a small angle to reduce material waste, then material utilization improves, but the single crystal may detach prematurely from the melt

Engineering Contradiction:
Improvematerial waste in end coneVSAvoidsingle crystal detachment risk
Core Design Contradiction:
Loss of substanceVSReliability

Solution Approach 1:

The patent uses real-time diameter measurements of the end cone to provide feedback on the pulling process, allowing dynamic adjustment of pulling parameters to maintain optimal conditions that prevent premature detachment while minimizing material waste

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent dynamically changes pulling parameters such as pulling speed and temperature based on measured diameter data to optimize the balance between end cone length and crystal stability

Inventive Principle:
Principle #35Parameter changes

4Measurement precision

If the camera position is changed during end cone drawing to capture smaller angles, then measurement capability improves, but additional effort is required and positioning precision is compromised

Engineering Contradiction:
Improveend cone diameter measurementVSAvoidcamera repositioning effort
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent pre-positions the camera and mirror in fixed locations before the pulling process begins, eliminating the need for dynamic repositioning during operation and ensuring consistent measurement geometry throughout the end cone drawing

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables precise control of the single crystal diameter during the end cone formation, reducing material waste and preventing premature tearing, resulting in higher reproducibility and quality of the crystal rods.

Implementation Method 1

the diameter of the single crystal, which depends on the radial growth of the single crystal at the crystallization boundary

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Implementation Method 2

This bright ring is a reflection from the glowing wall of the crucible containing the melt

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentEP3411515B1Method for determining and regulating a diameter of a single crystal during pulling of the single crystal
Publication Date: 2021.01.13 SILTRONIC AG
  • EP3411515B1 patent drawingFigure 1
  • EP3411515B1 patent drawingFigure 2~3
  • EP3411515B1 patent drawingFigure 4

AI summary

The invention relates to a method for determining a diameter (dk) of a single crystal (200) during the pulling of the single crystal (200), in particular an end-cone (210) of the single crystal (200), from a melt (230) in a crucible (130) of a device (100) for pulling the single crystal (200), wherein the diameter (dk) of the single crystal (200) is determined at a boundary surface to the melt (230), taking into account a first lowering speed (vs) of a surface (235) of the melt (230) relative to the crucible (130), a first lifting speed (vk) with which the single crystal (200) is raised relative to the crucible (130), and a conservation of mass.