Crystal Unit Electrode Structure for Low ESR and Stable Vibration

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Solution Overview

Problem

Existing small crystal units face challenges in reducing equivalent series resistor (ESR) values due to increased susceptibility to sub vibrations, requiring precise processing that hinders high productivity and yield in mass production.

Innovation Solution

The electrode structure of the crystal unit features a driven electrode arranged centrally with a two-layer configuration that concentrates and confines vibration energy in the central region, reducing ESR values without precise processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the crystal blank is made smaller to reduce device size, then the device becomes more compact, but the equivalent series resistor (CI) value increases and sub vibration susceptibility increases

Engineering Contradiction:
Improvecrystal unit sizeVSAvoidvibration stability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent applies local quality by creating a mesa structure with different heights in different regions of the crystal blank. The central region has a higher mesa structure that concentrates vibration energy, while the peripheral region has a lower structure. This local differentiation allows the small crystal blank to maintain stable vibration characteristics by confining vibration to the central high-mesa region, thereby reducing CI value and sub vibration susceptibility despite the overall small size.

Inventive Principle:
Principle #3Local quality

2Reliability

If precise processing is applied to the crystal blank side surface to suppress sub vibration, then vibration stability improves, but manufacturing complexity and production difficulty increase

Engineering Contradiction:
Improvevibration stabilityVSAvoidprocessing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the crystal blank into distinct regions with different mesa heights - a central high-mesa region and peripheral low-mesa regions. This segmentation is achieved through selective etching that creates the mesa structure in one processing step, avoiding the need for complex multi-step precise processing. The segmented structure naturally confines vibration to the central region while simplifying manufacturing.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent replaces complex mechanical processing (precise side surface machining requiring μm-level control) with a chemical etching process that naturally forms the desired mesa structure. By using etching instead of mechanical machining, the patent achieves the vibration-stabilizing structure with simpler, more controllable chemistry-based processes, reducing manufacturing complexity while maintaining vibration stability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If precise processing is applied to form desired crystal planes, then sub vibration is suppressed, but productivity decreases due to strict process control requirements

Engineering Contradiction:
Improvevibration stabilityVSAvoidmass production efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent employs a self-service approach where the etching process automatically forms the mesa structure with appropriate dimensions based on the etching conditions and crystal orientation. The process self-regulates to create the central high-mesa region and peripheral low-mesa regions without requiring complex real-time measurements or adjustments. This self-organizing capability enables mass production while maintaining consistent vibration characteristics.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces ESR values, improves yield and productivity, and stabilizes oscillation, while suppressing the influence of sub vibrations.

Implementation Method 1

a driven electrode arranged at least at a center on a main surface of a crystal blank, and the driven electrode has a structure for concentrating vibration energy of thickness shear vibration of the crystal blank

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS12512814B2Electrode structure of crystal unit, crystal unit, and crystal oscillator
Publication Date: 2025.12.30 MAXIS 01 CORP
  • US12512814B2 patent drawing
  • US12512814B2 patent drawing
  • US12512814B2 patent drawing

AI summary

The present invention is able to reduce a CI value without requiring precise processing of a crystal blank.An electrode structure of a crystal unit (1) according to the present invention includes driven electrodes (21, 22) arranged at least at a center on main surfaces (11, 12) of a crystal blank (10). The driven electrodes (21, 22) have a structure in which vibration energy of thickness shear vibration of the crystal blank (10) is concentrated in a central region of the crystal blank (10).