Single Crystal Furnace Heater Resistivity Layout for Low Oxygen Growth

Solution Overview

Problem

Existing single crystal furnace heaters struggle to balance the quality of the crystal rod, particularly in reducing oxygen content, while maintaining production efficiency and cost-effectiveness, due to issues with temperature fluctuations and heater lifespan.

Innovation Solution

A heater design for a single crystal furnace featuring a cylindrical heating cylinder with distinct resistivity from the electrode footplate, allowing for optimized heat distribution and reduced oxygen content without altering the cylinder's height or footplate thickness, using materials with varying resistivities to manage heat generation effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the speed of crucible rotation is reduced to reduce oxygen content in the crystal rod head, then oxygen content is reduced, but temperature fluctuation and wire breakage rate increase

Engineering Contradiction:

Improveoxygen contentVSAvoidtemperature fluctuation and wire breakage rate

Core Design Contradiction:

Quantity of substanceVSReliability

Solution Approach 1:

The heater structure implements local quality differentiation by using a heating cylinder with higher resistivity (≥11 μΩ·m) than the electrode footplate (≤10 μΩ·m). This creates a gradient in heat generation along the axial direction, with the heating cylinder producing more heat than the footplate. This localized heat distribution optimizes the thermal field in the crystal rod head region, enabling oxygen content reduction while maintaining temperature stability and preventing wire breakage.

Inventive Principle:

Principle #3Local quality

2Quantity of substance

If the height of the heating region of the heater is greatly reduced to reduce oxygen content, then oxygen content is reduced, but heat concentration increases, shortening heater service life and increasing costs

Engineering Contradiction:

Improveoxygen contentVSAvoidheater service life

Core Design Contradiction:

Quantity of substanceVSDuration of action of stationary object

Solution Approach 1:

The invention changes the resistivity parameter of the heater components to control heat generation. By setting the heating cylinder resistivity (≥11 μΩ·m) higher than the electrode footplate resistivity (≤10 μΩ·m), the system achieves optimal heat distribution without reducing the heating region height. This parameter optimization reduces oxygen content while maintaining heater service life and avoiding excessive heat concentration.

Inventive Principle:

Principle #35Parameter changes

3Power

If the heating amount of the electrode footplate is increased to improve heating efficiency, then heating efficiency is improved, but oxygen content in the crystal rod head increases

Engineering Contradiction:

Improveheating efficiencyVSAvoidoxygen content

Core Design Contradiction:

PowerVSQuantity of substance

Solution Approach 1:

The heater structure implements local quality differentiation by using a heating cylinder with higher resistivity (≥11 μΩ·m) than the electrode footplate (≤10 μΩ·m). This creates a gradient in heat generation along the axial direction, with the heating cylinder producing more heat than the footplate. This localized heat distribution optimizes the thermal field in the crystal rod head region, enabling oxygen content reduction while maintaining temperature stability and preventing wire breakage.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The invention changes the resistivity parameter of the heater components to control heat generation. By setting the heating cylinder resistivity (≥11 μΩ·m) higher than the electrode footplate resistivity (≤10 μΩ·m), the system achieves optimal heat distribution without reducing the heating region height. This parameter optimization reduces oxygen content while maintaining heater service life and avoiding excessive heat concentration.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively reduces oxygen content in the crystal rod, maintains crystal pulling stability, and lowers production costs by ensuring consistent heat generation and extended heater lifespan.

Implementation Method 1

a resistivity of the electrode footplate is less than a resistivity of the heating cylinder

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Implementation Method 2

the resistivity of the electrode footplate is less than a resistivity of the heating cylinder

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20260022491A1Heater for single crystal furnace and single crystal furnace

Publication Date: 2026.01.22 LONGI GREEN ENERGY TECH CO LTD

AI summary

This application provides a heater for a single crystal furnace and a single crystal furnace. In one example, a heater for a single crystal furnace includes a heating cylinder and an electrode footplate. The heating cylinder has a cylindrical structure arranged around a crucible in the single crystal furnace. The electrode footplate includes a first electrode footplate supporting one side of the heating cylinder and configured to connect to a first electrode of a power supply, and a second electrode footplate supporting another side of the heating cylinder and configured to connect to a second electrode of the power supply. A resistivity of a material of the electrode footplate is less than a resistivity of a material of the heating cylinder.