Crystal Orientation Map Generation in Charged Particle Beam Devices
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Solution Overview
Problem
Current scanning electron microscopes (SEMs) and transmission electron microscopes (TEMs) face challenges in simultaneously observing lattice defects and determining crystal orientations, as they require frequent position alignment and tilting of the sample, leading to lengthy work times and potential loss of the crystal grain within the visual field.
Innovation Solution
A crystal orientation figure creating device and method that acquires and displays crystal orientation information in real-time, allowing for the creation of crystal orientation figures during charged particle beam measurements, enabling synchronization of lattice defect observation with crystal orientation display using an integrated system within the SEM, TEM, or SIM.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If frequent position alignment and tilting of the sample is performed to observe lattice defects and determine crystal orientations, then measurement precision is improved, but measurement time increases and crystal grains may move out of the visual field
Solution Approach 1:
The patent combines lattice defect observation and crystal orientation determination into a single simultaneous measurement process. The crystal orientation figure creating device integrates the charged particle beam observation system with crystal orientation analysis, allowing both functions to be performed together rather than requiring separate alignment and measurement steps for each function.
Solution Approach 2:
The patent creates a crystal orientation figure that represents the crystal coordinate system relative to the incident charged particle beam direction. This figure serves as a visual copy or representation of the crystal orientation information, allowing operators to determine crystal orientations without performing frequent physical realignments of the sample or beam, thereby reducing measurement time while maintaining accuracy.
2Measurement precision
If frequent position alignment and tilting of the sample is performed to observe lattice defects and determine crystal orientations, then measurement precision is improved, but device operation complexity increases
Solution Approach 1:
The patent merges the control systems for lattice defect observation and crystal orientation determination into a unified system. The crystal orientation figure creating device automatically coordinates the charged particle beam incident direction with the sample orientation, eliminating the need for manual, frequent alignment operations and making the overall process easier to operate.
Solution Approach 2:
The patent implements a feedback mechanism where the crystal orientation figure is displayed in real-time based on the actual incident direction of the charged particle beam. This visual feedback allows operators to monitor crystal orientation information continuously without performing repeated alignment operations, simplifying the operation while maintaining measurement precision.
3Adaptability or versatility
If the incident direction of the charged particle beam is changed during measurement, then different crystal orientations can be observed, but the crystal grain may move out of the visual field
Solution Approach 1:
The patent creates a crystal orientation figure that serves as a visual representation of the crystal coordinate system relative to the incident beam direction. This figure allows the system to track and display crystal orientation information even when the incident direction changes, providing a virtual reference that helps maintain awareness of crystal grain position and orientation without requiring the physical grain to remain in the visual field.
Solution Approach 2:
The patent replaces the mechanical alignment and tracking system with a computational approach. Instead of physically tracking the crystal grain position through mechanical means, the system uses computer-based crystal orientation figure generation that calculates and displays orientation information based on the incident beam direction, making the system more adaptable to direction changes while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the simultaneous observation of lattice defects and crystal orientations, reducing measurement time and preventing crystal grain movement out of the visual field, thereby improving the efficiency of material analysis.
Implementation Method 1
detecting backscattered electrons and/or secondary electrons, etc. generated from a local region of the irradiated sample
Implementation Method 2
detecting backscattered electrons and/or secondary electrons, etc. generated from a local region of the irradiated sample
Implementation Method 3
The accelerated electron beam is then focused through magnetic field coils including condenser lenses, an objective lens, and the like into a nanoscale, ultra small spot size of the electron beam flux
Implementation Method 4
which is deflected by deflection coils at the same time. In such a manner, the sample surface is scanned with the converged electron beam flux
Implementation Method 5
A specific crystal orientation gives a darkest observation image. Such a condition is called an electron channeling condition (hereafter, also referred to simply as a 'channeling condition'). The channeling condition can be satisfied by adjusting an incident direction of an electron beam with respect to a sample.
Data Source
Figure 1
Figure 2(a)~2(b)
Figure 3(a)~4(b)
AI summary
There is provided a crystal orientation figure creating device for use in a charged particle beam device for making a charged particle beam irradiated to a surface of a sample, the crystal orientation figure creating device being configured to create a crystal orientation figure, which is a figure representing a crystal coordinate system of a crystal at a position selected on the surface with respect to an incident direction of the charged particle beam, the crystal orientation figure creating device including: an orientation information acquiring unit configured to acquire crystal orientation information with respect to the incident direction at the selected position; an incident direction information acquiring unit configured to acquire information relating to an incident direction of the charged particle beam with respect to the sample; and a crystal orientation figure creating unit configured to create a crystal orientation figure in a changed incident direction at the selected position, based on the crystal orientation information acquired by the orientation information acquiring unit, and the information relating to the incident direction at the time when the crystal orientation information is acquired and the information relating to the changed incident direction, acquired by the incident direction information acquiring unit.