Crystal Oscillator Sensor for Chemical Liquid Purity Management
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Solution Overview
Problem
Current methods for evaluating the purity of high-purity chemical liquids used in semiconductor manufacturing, such as those described in Patent Document 1, are complex, time-consuming, and lack general-purpose applicability, making them impractical for frequent use in industrial settings.
Innovation Solution
A management method involving a crystal oscillator sensor with an adsorption layer that measures impurity levels by detecting changes in resonance frequency, where the sensor is brought into contact with the chemical liquid, and the results are compared against a preset range to determine purity, with components made of materials like Si, Au, or fluorine-based resins to enhance accuracy and ease of use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a surface inspection device is used to evaluate chemical liquid purity, then measurement accuracy is improved, but measurement time increases and device complexity increases
Solution Approach 1:
The patent replaces the complex mechanical surface inspection device with a crystal oscillator-based sensing system. The crystal oscillator sensor detects impurities through resonance frequency changes, substituting mechanical/optical inspection with a simpler vibrational measurement approach that achieves comparable purity evaluation accuracy with reduced measurement time and device complexity.
Solution Approach 2:
The invention changes the measurement parameter from visual/optical defect detection to resonance frequency detection. By monitoring frequency shifts of the crystal oscillator when exposed to chemical liquids, the system achieves accurate purity evaluation through a different physical parameter that requires simpler equipment and faster measurement cycles.
2Measurement precision
If a surface inspection device is used to evaluate chemical liquid purity, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The patent replaces the complex mechanical surface inspection device with a crystal oscillator-based sensing system. The crystal oscillator sensor detects impurities through resonance frequency changes, substituting mechanical/optical inspection with a simpler vibrational measurement approach that achieves comparable purity evaluation accuracy with reduced measurement time and device complexity.
Solution Approach 2:
The invention extracts the essential measurement function from the complex surface inspection device, isolating only the critical sensing capability. By using a crystal oscillator that directly responds to impurity presence through frequency changes, the system removes unnecessary mechanical and optical components while retaining the core purity evaluation function.
3Measurement precision
If conventional purity evaluation methods are used, then measurement accuracy is maintained, but ease of operation deteriorates
Solution Approach 1:
The crystal oscillator sensor performs self-diagnosis through its resonance frequency response. When exposed to chemical liquids, the oscillator automatically detects impurities and generates a measurable frequency shift, eliminating the need for complex operational procedures. The system serves itself by directly transducing impurity presence into a readable signal without requiring elaborate measurement protocols.
Solution Approach 2:
The invention changes the measurement parameter from visual/optical defect detection to resonance frequency detection. By monitoring frequency shifts of the crystal oscillator when exposed to chemical liquids, the system achieves accurate purity evaluation through a different physical parameter that requires simpler equipment and faster measurement cycles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the evaluation of chemical liquid purity, reducing measurement time and improving industrial applicability by providing a more efficient and reliable method for managing the purity of chemical liquids containing organic solvents.
Implementation Method 1
obtaining an amount of change in a resonance frequency of the crystal oscillator resulting from contact of the target chemical liquid
Implementation Method 2
a crystal oscillator sensor including an adsorption layer that adsorbs the impurities
Data Source
AI summary
A management method of managing a purity of a chemical liquid containing an organic solvent by sensing impurities in the chemical liquid. The management method includes Step 1 of preparing a target chemical liquid containing an organic solvent; Step 2 of bringing the target chemical liquid into contact with a crystal oscillator sensor including an adsorption layer that adsorbs the impurities and a crystal oscillator and obtaining an amount of change in a resonance frequency of the crystal oscillator resulting from contact of the target chemical liquid; and Step 3 of managing the purity of the chemical liquid by comparing whether or not the obtained amount of change falls within a permissible range based on a preset purity of the target chemical liquid. In Step 2, at least a part of a liquid contact portion coming into contact with the target chemical liquid is made of a fluorine-based resin.