Crystal Pulling Speed Deviation Correction via Recursive Filtering

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Solution Overview

Problem

Conventional Czochralski crystal pulling systems face challenges in accurately maintaining pulling speed due to mechanical and electrical variations, particularly from worm gear wear and quality, leading to significant speed deviations that existing solutions fail to detect and correct effectively.

Innovation Solution

Implementing a control unit with a recursive algorithm and kinematic model filter that uses encoder position data to estimate and correct deviations in pulling speed, employing a discrete second-order polynomial to accurately track position and minimize digitization noise, and optionally using a fading average tracking filter with harmonic components to address periodic speed errors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If conventional worm gear speed reducers are used in crystal pulling systems, then mechanical speed reduction and torque transmission are achieved, but significant periodic speed deviations occur due to tooth wear and quality variations

Engineering Contradiction:
Improvetorque transmissionVSAvoidpulling speed accuracy
Core Design Contradiction:
PowerVSManufacturing precision

Solution Approach 1:

The patent implements a feedback control system that continuously monitors the actual crystal pulling speed using an encoder and compares it to the nominal speed. A recursive algorithm with kinematic model filter processes the position data to detect speed deviations, and a fading average tracking filter with harmonic components corrects periodic errors. The control unit adjusts motor commands in real-time to compensate for worm gear-induced speed variations, maintaining pulling speed accuracy despite mechanical imperfections.

Inventive Principle:
Principle #23Feedback

2Reliability

If high quality worm gear components are used, then speed reduction stability improves, but system cost and complexity increase

Engineering Contradiction:
Improvespeed reduction stabilityVSAvoidsystem cost
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces the reliance on high-precision mechanical worm gear components with a software-based solution. Instead of using expensive, high-quality gear components to achieve speed stability, the system uses a control unit with recursive algorithms and filtering methods to detect and correct speed deviations. This substitutes mechanical precision requirements with computational processing, reducing hardware costs and system complexity while maintaining or improving speed accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If mechanical parts are regularly calibrated, then servo electronics drift is corrected, but mechanical gear wear and quality issues remain unaddressed

Engineering Contradiction:
Improvespeed signal accuracyVSAvoidactual pulling speed consistency
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The patent introduces an intermediary computational layer between the motor control and the crystal pulling process. The recursive algorithm with kinematic model filter acts as a mediator that processes encoder position data and generates corrected motor commands. This intermediary system specifically addresses mechanical gear wear and quality issues by detecting periodic speed deviations and compensating for them through software, filling the gap left by conventional calibration methods that only address servo electronics drift.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS8496765B2Method for correcting speed deviations between actual and nominal pull speed during crystal growth
Publication Date: 2013.07.30 SUMCO PHOENIX CORP
  • US8496765B2 patent drawing
  • US8496765B2 patent drawing
  • US8496765B2 patent drawing

AI summary

A system and method correct crystal pulling motor speed deviations in a crystal pulling mechanism. In a first embodiment, a processor implements a tracking filter by estimating new filter state based on previous state and the since-then-travelled nominal distance, and then updating the filter state based on estimation error and filter gains which are also functions of the travelled nominal distance. In a second embodiment, a harmonic tracking filter suppresses residual harmonic modulation and allows a short time constant. Rapid variations of pulling speed may thus be corrected.