Crystal Resonator Plate Structure to Prevent Support-Part Gouging
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Solution Overview
Problem
The formation of gouges during etching in the base region of the support part of crystal resonator plates due to the anisotropy of the crystal, leading to bending and degradation of vibration characteristics, is a challenge in existing crystal resonator devices with a sandwich structure.
Innovation Solution
A crystal resonator plate design with a flat region on the connection part between the external frame and support parts, avoiding direct intersection with the inclined region, and incorporating an inclined region to distribute stress, thereby preventing gouge formation and improving shock resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If etching is performed to form the external shape of the crystal resonator plate, then the desired shape is achieved, but gouges are formed in the base region of the support part due to anisotropy of the crystal
Solution Approach 1:
The patent applies preliminary action by forming a flat region on the connection part before the final etching process. This flat region serves as a buffer zone that prevents the etching process from creating gouges in the support part base region. By preparing this flat region in advance, the harmful effect of anisotropic etching is mitigated before it can affect the critical support structure.
Solution Approach 2:
The patent converts the harmful effect of anisotropic etching into a beneficial feature by intentionally designing the flat region to exploit the anisotropy. The etching process naturally creates inclined regions due to crystal anisotropy, and the invention positions the flat region to intercept these inclined regions before they can reach the support part, thereby converting the potentially harmful anisotropic effect into a protective feature.
2Length of stationary object
If the support part is made thinner to reduce overall device height, then package size is reduced, but the support part becomes more susceptible to bending and degradation
Solution Approach 1:
The patent applies beforehand cushioning by introducing a flat region as a stress-distributing structure before the support part becomes vulnerable to bending. This flat region acts as a cushion that distributes mechanical stresses and prevents stress concentration at the base of the thin support part, thereby protecting the weakened structure from bending and degradation despite its reduced thickness.
Solution Approach 2:
The patent applies parameter changes by modifying the geometric parameters of the connection part between the external frame and support part. By creating a flat region with specific dimensions and positioning, the structural parameters are optimized to provide enhanced support to the thin support part, compensating for the reduced thickness through improved geometric configuration.
3Shape
If the inclined region intersects with the side surface of the support part, then etching proceeds uniformly, but a gouge is formed that extends into the support part
Solution Approach 1:
The patent applies the intermediary principle by introducing the flat region as a mediator between the inclined region (created by anisotropic etching) and the support part. This flat region intercepts the inclined etching front, preventing it from directly intersecting with the support part side surface. The flat region serves as an intermediate structure that absorbs the harmful effect of the inclined etching while maintaining uniform etching progression in other areas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents gouge formation, reduces bending of the support part, and maintains vibration characteristics by distributing stress, enhancing the shock resistance and stability of the crystal resonator device.
Implementation Method 1
the inclined region provided on the connection part connecting the external frame part to the support part can progressively weaken the force. In this way, it is possible to reduce external stress from the external frame part to the vibrating part by providing the inclined region
Implementation Method 2
an inclined region is formed on a part of the external frame part so as to gradually become thinner from the thick external frame part toward the thin support part because of anisotropy of the crystal
Data Source
AI summary
A crystal resonator plate according to an embodiment may include: an external frame part; a vibrating part formed thinner than the external frame part; a penetrating part formed between the external frame part and the vibrating part; and a support part formed thinner than the external frame part, which couples the external frame part to the vibrating part. A connection part connecting the external frame part to the support part on one main surface includes: a flat region formed on the same plane as the support part; and an inclined region inclined with respect to the flat region. In an end part of the support part on the connection part side, at least regions and positioned on the penetrating part side are formed continuously to the flat region.