Crystalline Orientation Mapping Using Backscattered Beam Images

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Solution Overview

Problem

Conventional crystal orientation mapping is time-consuming and memory-intensive due to the detection and storage of diffraction images at each grid point, and the detectors used are expensive.

Innovation Solution

A method involving the recording of images using a charged particle beam at different orientation settings, defined by azimuthal and elevation angles, to generate a crystalline orientation map, utilizing backscattered particles for faster image capture and reduced memory usage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If diffraction images are detected and stored at each grid point using conventional crystal orientation mapping, then crystalline orientation information is obtained, but the process becomes time-consuming and memory-intensive

Engineering Contradiction:
Improvecrystalline orientation informationVSAvoidmapping process time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent extracts only the essential information needed for crystalline orientation mapping by recording simple intensity images instead of full diffraction images. By taking out only the necessary data (intensity values at different orientations) and discarding redundant information (complete diffraction patterns), the method achieves orientation mapping without the time and memory burden of conventional approaches

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of recording complete diffraction images for every grid point, the patent uses a reduced set of measurements - simple intensity images at specific orientations. This partial action approach captures sufficient information for orientation determination while significantly reducing data volume and processing time

Inventive Principle:
Principle #16Partial or excessive action

2Measurement precision

If diffraction images are detected and stored at each grid point, then crystalline orientation information is obtained, but memory requirements increase significantly

Engineering Contradiction:
Improvecrystalline orientation informationVSAvoidmemory storage requirement
Core Design Contradiction:
Measurement precisionVSQuantity of substance

Solution Approach 1:

The patent extracts only the essential information needed for crystalline orientation mapping by recording simple intensity images instead of full diffraction images. By taking out only the necessary data (intensity values at different orientations) and discarding redundant information (complete diffraction patterns), the method achieves orientation mapping without the time and memory burden of conventional approaches

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces expensive, large-memory diffraction image storage with simple, minimal intensity value recordings. Each measurement point stores only essential orientation-related data rather than complete diffraction patterns, dramatically reducing memory requirements while maintaining orientation mapping capability

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Measurement precision

If a detector for detecting diffraction images is used, then crystalline orientation information is obtained, but the device cost increases

Engineering Contradiction:
Improvecrystalline orientation informationVSAvoiddetector cost
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses simple intensity images as a copy or surrogate for the more complex diffraction images. Instead of requiring expensive specialized detectors for diffraction pattern capture, the method uses standard imaging detectors to record intensity distributions, which then serve as sufficient copies for orientation determination

Inventive Principle:
Principle #26Copying

Solution Approach 2:

The patent replaces expensive, large-memory diffraction image storage with simple, minimal intensity value recordings. Each measurement point stores only essential orientation-related data rather than complete diffraction patterns, dramatically reducing memory requirements while maintaining orientation mapping capability

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method significantly reduces the time and memory requirements for generating a crystalline orientation map while providing qualitative information on grain structures, offering a faster and more efficient alternative to conventional methods.

Implementation Method 1

recording an image of the surface portion using particles of a charged particle beam directed to the surface portion and backscattering from the surface portion

Methodology Applied
Scientific EffectBackscattering: Scattering

Data Source

PatentUS12394588B2Method of generating a crystalline orientation map of a surface portion of a sample and computer program product
Publication Date: 2025.08.19 CARL ZEISS MICROSCOPY GMBH
  • US12394588B2 patent drawing
  • US12394588B2 patent drawing
  • US12394588B2 patent drawing

AI summary

A method generates a crystalline orientation map of a surface portion of a sample. A crystalline orientation map represents crystalline orientations at a plurality of sample locations of the surface portion. The method comprises recording an image of the surface portion including a central location using particles of a charged particle beam directed to the surface portion and backscattering from the surface portion for each of a plurality of different orientation settings. Each of the orientation settings is defined by an azimuthal angle and an elevation angle under which the charged particle beam is incident onto the central location during the recording of the respective image. The method also includes generating the crystalline orientation map based on the recorded images.