CsBr Photocathode Electron Beam Activation

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Solution Overview

Problem

The use of CsBr-based photoelectron sources in electron beam lithography and related applications is limited by the need for bulky and expensive UV lasers to generate sufficiently energetic photons, which hampers the achievement of heightened quantum efficiencies and extended photocathode lifetimes.

Innovation Solution

The method involves using electron beam bombardment to activate color centers in CsBr films, allowing photoelectron emission with longer wavelengths, such as 405 nm, which enhances quantum efficiency and extends photocathode lifetime, using a compact laser or LED light source and repeated electron beam exposure to maintain high photoelectron yield.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If UV laser activation is used to create color centers in CsBr films, then photoelectron emission can be achieved, but the system requires bulky and expensive UV lasers with short wavelengths

Engineering Contradiction:
Improvephotoelectron yieldVSAvoidlaser system size and cost
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The invention changes the activation parameter from UV photons to electron bombardment, creating color centers through electron impact rather than optical excitation. This allows the use of longer wavelength light (visible to near-IR range) for photoelectron emission, eliminating the need for expensive UV lasers while maintaining or improving photoelectron yield.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the optical activation mechanism (UV laser) with an electron beam activation mechanism. By using electron bombardment to create color centers, the system substitutes a mechanical/electrical process for an optical one, enabling the use of simpler, less expensive light sources for subsequent photoelectron emission.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Duration of action of stationary object

If UV radiation is used to activate color centers, then photoelectron emission is enabled, but the photocathode lifetime is limited due to material degradation

Engineering Contradiction:
Improvephotocathode lifetimeVSAvoidUV radiation damage
Core Design Contradiction:
Duration of action of stationary objectVSObject-affected harmful factors

Solution Approach 1:

The invention converts the harmful effect of high-energy radiation into a beneficial activation process by using electron bombardment instead of UV radiation. The electron beam creates the necessary color centers without causing the same degree of material degradation and bromine atom expulsion that occurs with UV activation, thereby extending photocathode lifetime.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The invention performs preliminary activation of the CsBr film using electron bombardment before photoelectron emission begins. This pre-creation of color centers through electron impact establishes a stable state that enables subsequent photoelectron emission without continuous UV exposure, reducing cumulative radiation damage and extending operational lifetime.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If UV lasers are used to achieve high photoelectron yield, then quantum efficiency can be improved, but the system becomes less practical due to cost and size

Engineering Contradiction:
Improvequantum efficiencyVSAvoidsystem practicality
Core Design Contradiction:
ProductivityVSEase of operation

Solution Approach 1:

The invention changes the wavelength parameter of the activation process from UV to electron beam, which subsequently enables the use of longer wavelength light sources for photoelectron emission. This parameter change maintains high quantum efficiency while dramatically improving system practicality by allowing the use of compact, inexpensive light sources such as LEDs or visible lasers.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces expensive, complex UV laser systems with cheaper, simpler light sources that can be used for photoelectron emission. By using electron beam activation to create color centers, the system enables the use of inexpensive LEDs or visible lasers that have longer lifetimes and lower operational costs, improving overall system practicality.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves more than a factor of 1000 improvement in quantum efficiency and a factor of 500 improvement in photocathode lifetime compared to UV activation, enabling efficient operation with less expensive and smaller lasers, and allows for sustained high photoelectron yield under long wavelength photon exposure.

Implementation Method 1

activation of color centers inside a photocathode

Methodology Applied
Scientific EffectColor center creation: Photochromism

Implementation Method 2

using an electron beam bombardment to activate color centers inside of a photocathode

Methodology Applied
Scientific EffectElectron beam bombardment: Electron Beam

Implementation Method 3

using a light source for pumping electrons in the color centers of the photocathode

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS9406488B2Enhanced photoelectron sources using electron bombardment
Publication Date: 2016.08.02 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV
  • US9406488B2 patent drawing
  • US9406488B2 patent drawing
  • US9406488B2 patent drawing

AI summary

A method of achieving heightened quantum efficiencies and extended photocathode lifetimes is provided that includes using an electron beam bombardment to activate color centers in a CsBr film of a photocathode, and using a laser source for pumping electrons in the color centers of the photocathode.