CTE-Engineering Die Pair for Semiconductor Warpage Control

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Solution Overview

Problem

The challenge in semiconductor packaging lies in the structural issues arising from the coefficient of thermal expansion (CTE) mismatch between components, leading to defects during the packaging process of larger semiconductor dies, particularly when integrating silicon dies with organic components in 3D packaging.

Innovation Solution

The solution involves engineering a CTE-engineering die, typically made of copper, to dominate the combined CTE of the semiconductor die and the CTE-engineering die pair, ensuring compatibility with organic components and improving thermal performance by using a eutectic gold-tin solder for bonding, thereby facilitating better warpage control and yield in fan-out processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the semiconductor die size is increased to include multi-functional components, then the functionality is improved, but the CTE mismatch defects increase during packaging

Engineering Contradiction:
Improvemulti-functional componentsVSAvoidpackaging defects
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

A CTE-engineering die is introduced as an intermediary component between the semiconductor die and the organic substrate. This intermediate die has engineered CTE properties that bridge the gap between the silicon semiconductor die and the organic substrate, reducing thermal stress and preventing packaging defects while allowing larger multi-functional dies to be packaged reliably

Inventive Principle:
Principle #24Intermediary (Mediator)

2Volume of moving object

If a coreless substrate is used to reduce package size, then the compactness is improved, but the warpage control deteriorates

Engineering Contradiction:
Improvepackage sizeVSAvoidwarpage
Core Design Contradiction:
Volume of moving objectVSShape

Solution Approach 1:

The CTE properties of the die stack are engineered by selecting specific materials and thicknesses for the CTE-engineering die. By adjusting the CTE parameter of the intermediate die, the overall thermal expansion behavior of the package is controlled, enabling warpage compensation while maintaining the compact coreless substrate design

Inventive Principle:
Principle #35Parameter changes

3Productivity

If silicon die is integrated with organic components in 3D packaging, then the circuit density is improved, but the CTE mismatch causes detrimental defects

Engineering Contradiction:
Improvecircuit densityVSAvoidpackaging defects
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

A composite die stack is created consisting of the silicon semiconductor die bonded to the CTE-engineering die. This composite structure combines the high-performance silicon circuitry with the CTE-engineered intermediate layer, achieving both high circuit density and thermal expansion compatibility with organic substrates

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the thermal performance, reduces mechanical risks, and improves the compatibility with organic build-up technology, leading to improved yield and heat handling in semiconductor devices, particularly in bumpless build-up layer (BBUL) processing and coreless substrate applications.

Implementation Method 1

the effect of differences in the coefficients of thermal expansion (CTE) between components used in a semiconductor package can lead to detrimental defects

Methodology Applied
Scientific EffectCoefficient of thermal expansion (CTE): Thermal Expansion

Implementation Method 2

using a eutectic gold-tin solder for bonding

Methodology Applied
Scientific EffectEutectic soldering: Soldering

Data Source

PatentUS10381288B2Packaged semiconductor die and CTE-engineering die pair
Publication Date: 2019.08.13 INTEL CORP
  • US10381288B2 patent drawing
  • US10381288B2 patent drawing
  • US10381288B2 patent drawing

AI summary

Packaged semiconductor die and CTE-engineering die pairs and methods to form packaged semiconductor die and CTE-engineering die pairs are described. For example, a semiconductor package includes a substrate. A semiconductor die is embedded in the substrate and has a surface area. A CTE-engineering die is embedded in the substrate and coupled to the semiconductor die. The CTE-engineering die has a surface area the same and in alignment with the surface area of the semiconductor die.