CuO-Seeded Transparent Conductors for Ultra-Thin Noble Metal Films

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Solution Overview

Problem

Existing transparent conductors like ITO face issues with indium scarcity, manufacturing defects, brittleness, and inadequate performance in infrared applications due to plasma resonances, while ultra-thin metal films of noble metals suffer from oxidation and insufficient transparency and conductivity.

Innovation Solution

A seed layer of cupric oxide (CuO) with a thickness less than or equal to 1.3 nm is applied to a body, followed by a noble metal ultra-thin film, enhancing adherence and resistance to oxidation, maintaining transparency across visible and infrared spectra.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ITO is used as a transparent conductor, then electrical conductivity and visible transparency are achieved, but indium scarcity and high cost occur

Engineering Contradiction:
Improveelectrical conductivityVSAvoidindium availability
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent changes the material composition parameters by replacing ITO with alternative transparent conductive materials such as aluminum-doped zinc oxide (AZO) and fluorine-doped tin oxide (FTO), which use abundant elements instead of scarce indium, while maintaining electrical conductivity through doping mechanisms

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs cheaper alternative materials (AZO, FTO) that can be deposited as thin films to replace expensive ITO, achieving cost reduction while maintaining functional performance through optimized film thickness and composition

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Reliability

If ITO is applied to a body, then transparent conductivity is achieved, but surface defects and vacancies occur requiring post-deposition treatments

Engineering Contradiction:
Improvetransparent conductivityVSAvoidsurface quality
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary surface treatment to the body substrate before depositing the transparent conductive material, including plasma treatment and chemical etching, to ensure surface cleanliness and proper adhesion, thereby preventing surface defects and vacancies in the final coating

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent optimizes deposition parameters such as deposition temperature, pressure, and material composition ratios during the coating process to achieve dense, defect-free films with improved surface quality and reduced vacancies

Inventive Principle:
Principle #35Parameter changes

3Reliability

If ITO is used in flexible applications, then transparent conductivity is achieved, but brittleness prevents flexible article formation

Engineering Contradiction:
Improveelectrical conductivityVSAvoidflexibility
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent changes the mechanical parameters by depositing ultra-thin films (50-200 nm) of transparent conductive materials on flexible substrates, and by controlling the grain structure and stress state of the coating to achieve flexibility while maintaining electrical conductivity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs thin film technology to create flexible transparent conductive coatings on flexible substrates such as plastic films, replacing brittle ITO with materials and structures that can withstand bending and deformation while maintaining electrical performance

Inventive Principle:
Principle #30Flexible shells and thin films

4Reliability

If cupric oxide seed layer is applied to enhance noble metal film quality, then adherence and oxidation resistance are improved, but surface roughness may increase

Engineering Contradiction:
Improveadherence and oxidation resistanceVSAvoidsurface roughness
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent optimizes the thickness parameter of the cupric oxide seed layer to a specific range (0.5-2 nm) that provides sufficient adhesion and oxidation resistance while maintaining surface smoothness, and controls the deposition conditions to achieve fine-grained structures with minimal roughness

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resulting article achieves high transparency and electrical conductivity with low surface roughness, maintaining transparency and conductivity even as the noble metal ultra-thin film thickness varies from 1 to 5 nm.

Implementation Method 1

The present disclosure addresses those issues by disposing a seed layer of cupric oxide (CuO) having a thickness less than or equal to 1.3 nm onto a body that is transparent

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS12351899B2Transparent article with a body and metal oxide disposed directly on the body, facilitating deposition of an electrically conductive and transparent ultra-thin metal film of a noble metal, and method of forming the same
Publication Date: 2025.07.08 CORNING INC
  • US12351899B2 patent drawing
  • US12351899B2 patent drawing
  • US12351899B2 patent drawing

AI summary

An article comprising: (i) a body, the body comprising a material and a transmittance greater than or equal to 90% throughout an electromagnetic radiation wavelength range of 250 nm to 800 nm; and (ii) cupric oxide (CuO) in direct contact with the material of the body, the cupric oxide (CuO) comprising a thickness that is less than or equal to 1.3 nm. Also disclosed is the article further comprising: an ultra-thin metal film disposed directly on the cupric oxide (CuO). The article demonstrates a transmittance greater than or equal to 65% throughout an electromagnetic radiation wavelength range of 300 nm to 1400 nm. The ultra-thin metal film can be silver (Ag), gold (Au), copper (Cu), or platinum (Pt). The ultra-thin metal film comprises a thickness within a range of 1 nm to 5 nm. The article at the ultra-thin metal film has a sheet resistance of less than or equal to 2100 Ω/□. Additionally, a method of forming the article.