Cup Cleaning Unit With Concave Portion For Liquid Processing
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Solution Overview
Problem
Conventional liquid processing apparatuses face contamination issues due to chemical liquids scattered during processing, which can adhere to the cup and affect subsequent substrate processing, leading to substrate contamination.
Innovation Solution
A liquid processing apparatus with a cup cleaning unit that supplies a cleaning liquid to a concave portion in the upper part of the cup, featuring an inclined structure where the height level decreases towards the outer periphery and increases back, allowing for effective discharge of the cleaning liquid, and optionally using a rotational cup to distribute the cleaning liquid across the entire area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cup is used to surround the substrate holding unit during liquid processing, then liquid processing can be performed, but chemical liquids scatter and adhere to the cup causing substrate contamination
Solution Approach 1:
The patent applies preliminary action by cleaning the cup before substrate processing. The cup cleaning unit supplies cleaning liquid to the cup's upper part to remove chemical liquid residues beforehand, preventing contamination of subsequent substrates. This proactive cleaning approach ensures the cup is ready for the next processing cycle without causing harm.
Solution Approach 2:
The patent uses cleaning liquid as an intermediary substance to remove harmful chemical liquid residues from the cup. The cleaning liquid acts as a mediator between the contaminated cup surface and the substrate, transferring cleaning function while preventing direct contact between harmful chemicals and the substrate.
2Reliability
If cleaning liquid is supplied to the cup to remove residues, then contamination is prevented, but cleaning liquid must be effectively discharged to avoid new contamination
Solution Approach 1:
The patent applies dimensionality change by forming a concave portion in the upper part of the cup. This geometric modification creates a dedicated space for cleaning liquid accumulation and controlled discharge. The concave structure adds a vertical dimension to the cleaning process, allowing cleaning liquid to be contained and discharged systematically rather than spilling randomly.
Solution Approach 2:
The patent segments the cup structure by creating a distinct concave portion separated from the main processing area. This segmentation isolates the cleaning liquid discharge function from the substrate processing zone, allowing cleaning operations to occur without interfering with substrate handling and ensuring discharged cleaning liquid does not contaminate substrates.
3Ease of manufacture
If the cup structure is modified with a concave portion for cleaning liquid discharge, then cleaning effectiveness is improved, but device complexity increases
Solution Approach 1:
The patent applies local quality by modifying only the upper part of the cup where a concave portion is formed. This localized structural change concentrates the cleaning function in a specific area without redesigning the entire cup. The rest of the cup maintains its original simple cylindrical shape, minimizing the increase in overall device complexity while achieving effective cleaning liquid discharge.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents substrate contamination by thoroughly cleaning the cup, ensuring a contamination-free environment for subsequent processing by effectively removing residual chemicals from the cup.
Implementation Method 1
a cup cleaning unit cleaning the cup by supplying a cleaning liquid to the upper part of the cup
Implementation Method 2
a concave portion is formed in the upper part of the cup and the cup cleaning unit supplies the cleaning liquid to the concave portion in the upper part of the cup
Data Source
AI summary
Disclosed are a liquid processing apparatus and a liquid processing method that can prevent a substrate in a processing chamber from being contaminated due to contamination attached to a cup. The liquid processing apparatus includes: a processing chamber in which a substrate holding unit holding a substrate and a cup placed around the substrate holding unit are installed; a nozzle for supplying a processing liquid to the substrate held by the substrate holding unit; and a cup cleaning unit cleaning the cup by supplying a cleaning liquid to the upper part of the cup. A concave portion is formed in the upper part of the cup and the cup cleaning units supply the cleaning liquid to the concave portion in the upper part of the cup.