Cup Design for Rotary Substrate Processing Liquid Containment
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Solution Overview
Problem
Rotary substrate processing apparatuses face issues with processing liquids scattering and rebounding onto substrates, leading to defects due to the design of the cup surrounding the spin holders, which fails to effectively collect and contain the scattered liquids.
Innovation Solution
A cup design featuring a first and second member with a gradually decreasing spacing and a third member with an inner surface spaced apart from the clearance, guiding scattered processing liquids outward and preventing them from rebounding, utilizing a clearance system that ensures the liquids are collected and contained without returning to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a cup surrounds a spin holder to prevent processing liquid scattering, then the processing liquid is contained, but the processing liquid rebounds from the cup inner surface and adheres to the substrate
Solution Approach 1:
The cup is divided into multiple members (first member, second member, third member) with different functions. The first and second members form a clearance to guide liquid outward, while the third member provides a receiving space. This segmentation allows the cup to simultaneously contain scattered liquid and prevent rebounding to the substrate.
Solution Approach 2:
Different regions of the cup have different structural characteristics. The clearance region between the first and second members has a specific spacing configuration to guide liquid flow outward, while the third member's inner surface is positioned to receive and contain the liquid. This local differentiation of structural properties enables simultaneous liquid containment and rebound prevention.
2Device complexity
If the cup structure is simplified to a single member, then the device complexity is reduced, but the processing liquid cannot be effectively collected and contained without rebounding
Solution Approach 1:
The cup is segmented into three functional members: the first member forms part of the clearance structure, the second member completes the clearance to guide liquid outward, and the third member provides the receiving space. This segmentation achieves effective liquid containment and rebound prevention while maintaining reasonable structural complexity.
Solution Approach 2:
The first and second members are nested within the third member, forming a hierarchical structure. The clearance between the first and second members is contained within the space defined by the third member's inner surface. This nesting arrangement achieves complex functionality within a compact structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The cup effectively collects and contains scattered processing liquids, preventing them from rebounding onto the substrate, thereby reducing processing defects and ensuring efficient substrate processing.
Implementation Method 1
a cup surrounds a spin holder to prevent a part of a processing liquid from scattering to a peripheral portion of the substrate with a centrifugal force generated when the substrate rotates
Data Source
AI summary
A cup intermediate portion and a cup lower portion surround a substrate. The cup intermediate portion is arranged above an upper surface of the cup lower portion. A sidewall surrounds the cup intermediate portion and the cup lower portion. A spacing between the upper surface of the cup lower portion and a lower surface of the cup intermediate portion gradually decreases outward from an outer peripheral portion of the substrate while a clearance is formed between the lower surface of the cup intermediate portion and the upper surface of the cup lower portion in respective outer peripheral portions of the cup intermediate portion and the cup lower portion. An inner peripheral surface of the sidewall is spaced apart from the clearance outside the clearance and surrounds the clearance.