Cup Member Imaging in Substrate Processing With Rotating Holder Alignment
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Solution Overview
Problem
Existing substrate processing systems face challenges in accurately imaging and inspecting the state of cup members due to obstacles from processing liquid supply nozzles and scattering prevention cups, limiting the precision and range of imaging.
Innovation Solution
A substrate processing apparatus that includes a rotating holder and imaging unit, allowing the imaging unit to adjust its position to a predetermined first imaging position relative to the cup member, enabling clear imaging without obstacles and covering the entire circumference for precise state assessment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the imaging device is disposed above the processing liquid supply nozzle and scattering prevention cup, then the imaging path is established, but the imaging precision deteriorates due to obstacles blocking the imaging target
Solution Approach 1:
The holder is configured to rotate, allowing the imaging device to dynamically change its position relative to the cup member. By rotating the holder to a predetermined imaging position, the imaging device can capture images of the cup member from optimal angles without obstruction from the processing liquid supply nozzle or scattering prevention cup, thereby improving imaging precision while avoiding obstacle interference.
2Measurement precision
If the imaging device is positioned to avoid obstacles, then the imaging range is reduced, but the imaging precision is improved
Solution Approach 1:
The rotating holder enables the imaging device to access multiple positions around the cup member. By rotating to different predetermined imaging positions, the device can capture images of different regions of the cup member, effectively expanding the total imaging range while maintaining high precision at each position by avoiding obstacles.
3Measurement precision
If the holder rotates to adjust imaging position, then the imaging precision is improved, but the processing time increases
Solution Approach 1:
The system pre-determines optimal imaging positions on the holder where the imaging device can capture images of the cup member without obstruction. By rotating the holder to these predetermined positions, the system achieves high imaging precision while minimizing rotation time, as the device doesn't need to search for optimal positions during operation.
Data Source
AI summary
A substrate processing apparatus includes an inspection substrate including a base and an imaging unit disposed at the base; a holder configured to hold a substrate or the inspection substrate; a driving unit configured to rotate the holder; a processing liquid supply configured to supply a processing liquid to the substrate held by the holder; a cup member configured to surround the holder; and a controller. The controller is configured to perform: adjusting a position of the imaging unit with respect to the cup member to a predetermined first imaging position in a state that the inspection substrate is held by the holder; and imaging, after the adjusting of the position of the imaging unit to the first imaging position, an imaging target that is located in a space closer to the cup member than to an outer periphery of the base at the first imaging position.