Curable Composition Gradient Release Agent Nanoimprint Filling

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional nanoimprint methods face challenges with slow filling speed of curable compositions into fine irregular patterns and compromised releasability of cured films.

Innovation Solution

A curable composition comprising a polymerization initiator, a polymerizable compound, and an internal addition type release agent with hydrophilic functional groups, which is uniformly distributed to enhance filling speed and releasability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a surfactant is used as an internal addition type release agent and unevenly distributed at high concentration toward the upper layer, then releasability of the cured film is excellent, but the filling speed of the curable composition into the mold is slow

Engineering Contradiction:
ImprovereleasabilityVSAvoidfilling speed
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The patent applies local quality by creating a gradient distribution of the release agent where the concentration varies through the thickness of the curable composition. The release agent is concentrated near the mold interface (lower layer) rather than uniformly or toward the upper layer, providing localized release functionality exactly where needed at the mold-film interface while maintaining fast filling speed in the bulk material.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the concentration parameter of the release agent from uniform distribution to gradient distribution, and specifically positions the high concentration region at the mold interface rather than toward the upper layer. This parameter optimization resolves the contradiction by providing sufficient release agent at the critical interface region while avoiding excessive concentration that would slow filling.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the curable composition is designed for fast filling speed, then productivity is improved, but releasability of the cured film may be compromised

Engineering Contradiction:
Improvefilling speedVSAvoidreleasability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent resolves this contradiction by applying local quality - concentrating the release agent specifically at the mold interface region rather than distributing it uniformly throughout the composition. This localized concentration provides sufficient releasability at the critical interface while maintaining fast filling speed in the bulk curable composition, thus achieving both high productivity and reliable release.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The release agent acts as an intermediary substance that mediates between the mold and the cured film. By positioning this intermediary at the mold interface with optimized concentration, the patent enables easy separation (releasability) without requiring the entire curable composition to have properties that would slow filling, thus resolving the contradiction between productivity and reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition achieves fast filling into intricate patterns and excellent releasability, improving the efficiency and quality of the nanoimprint process.

Implementation Method 1

curing a curable composition applied to a substrate with light, heat, or the like

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 2

an internal addition type release agent having a hydrophilic functional group

Methodology Applied
Scientific EffectHydrophilic interaction: Hydrophile

Data Source

PatentEP3010943B1Curable composition, film, and method of producing film
Publication Date: 2024.04.03 CANON KK
  • EP3010943B1 patent drawingFigure 1A~1F
  • EP3010943B1 patent drawing
  • EP3010943B1 patent drawing

AI summary

Provided is a curable composition, including a polymerization initiator; a polymerizable compound; and an internal addition type release agent having a hydrophilic functional group, in which the internal addition type release agent is prevented from being unevenly distributed in a gas-liquid interface of the curable composition.