Curable Composition Impurity Control for Imprint Releasability
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Solution Overview
Problem
The existing imprint methods face challenges in achieving high releasability and ink jet discharge accuracy due to the deterioration of release agents and the gelling of polymerizable compounds during distillation, particularly with commercially available neopentyl glycol diacrylate used in thermal imprint techniques.
Innovation Solution
A curable composition is formulated with neopentyl glycol diacrylate as the primary polymerizable compound, where the total content of specific impurities (represented by Formulas I and II) is limited to 5% or less, ensuring improved viscosity reduction and enhanced releasability, and incorporating a photopolymerization initiator for precise pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If release agent is applied to improve mold releasability, then releasability is improved, but the release agent deteriorates with repeated imprinting
Solution Approach 1:
The invention extracts and removes harmful impurities (carboxylic acid compounds and hydroxyl compounds) from neopentyl glycol diacrylate through purification processes, thereby eliminating the source of release agent deterioration while maintaining the releasability benefits
Solution Approach 2:
The invention changes the purity parameter of neopentyl glycol diacrylate by specifying strict limits on impurity content (carboxylic acid compounds ≤5% and hydroxyl compounds ≤5% relative to neopentyl glycol diacrylate), which prevents release agent deterioration while maintaining excellent releasability
2Measurement precision
If viscosity is reduced for ink jet discharge, then ink jet discharge accuracy is improved, but polymerizable compound gels during distillation
Solution Approach 1:
The invention extracts and removes impurities that cause gelling during distillation through purification processes, enabling viscosity reduction without gelation
Solution Approach 2:
The invention changes the purity parameter by specifying strict limits on impurity content (carboxylic acid compounds ≤5% and hydroxyl compounds ≤5% relative to neopentyl glycol diacrylate), which prevents gelation during distillation while allowing viscosity to be reduced to 15 mPa·s or less for excellent ink jet discharge accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The curable composition achieves excellent ink jet discharge accuracy and mold releasability, improving the overall precision and durability of the pattern formation process, suitable for applications in semiconductor manufacturing and other precision machining fields.
Implementation Method 1
a curable composition is photo-cured under irradiation with light through a translucent mold or a translucent substrate
Data Source
AI summary
Provided are a curable composition having excellent releasability and ink jet discharge accuracy, a pattern forming method, a pattern, and a method for manufacturing a device.The curable composition includes a polymerizable compound and a photopolymerization initiator, in which neopentyl glycol diacrylate accounts for 10% by mass or more of the polymerizable compound, and the total content of a compound represented by the following Formula (I) and a compound represented by the following Formula (II) is 5% by mass or less with respect to the content of neopentyl glycol diacrylate.