Curable Composition for Light-Shielding Film Pattern Linearity
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Solution Overview
Problem
Existing curable compositions used for forming light-shielding films in solid-state imaging devices suffer from deteriorated pattern linearity, especially at lower exposure doses, due to inadequate light absorption and heat management.
Innovation Solution
A curable composition incorporating a visible light-absorbing coloring agent and an infrared ray-absorbing coloring agent, along with a polymerizable compound and a photopolymerization initiator, is formulated to achieve specific optical densities, ensuring excellent linearity of the cured film pattern by optimizing light absorption and heat utilization during exposure and development.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a curable composition with black pigment is used to form a light-shielding film, then light-shielding capability is improved, but pattern linearity deteriorates at lower exposure doses
Solution Approach 1:
The patent changes the optical parameters of the curable composition by incorporating specific coloring agents with defined absorption characteristics. The composition achieves a minimum optical density of 1 or more in the 380-1100 nm wavelength range, with controlled differential optical density between visible and infrared ranges, enabling effective light shielding while maintaining pattern linearity at lower exposure doses
Solution Approach 2:
The patent creates a composite curable composition combining multiple components: a polymerizable compound, photopolymerization initiator, and coloring agent(s) with specific optical properties. This composite formulation integrates light-shielding functionality with controlled photopolymerization characteristics, resolving the contradiction between shielding capability and pattern formation quality
2Productivity
If exposure dose is reduced to improve manufacturing efficiency, then productivity is improved, but pattern linearity deteriorates
Solution Approach 1:
The patent modifies the optical density parameters of the curable composition to achieve a minimum value of 1 or more across the 380-1100 nm range. This parameter optimization enables the composition to maintain excellent pattern linearity even when exposed at lower exposure doses, thereby improving manufacturing efficiency without sacrificing pattern quality
3Object-affected harmful factors
If optical density is increased to improve light-shielding properties, then light-shielding capability is improved, but exposure and developability worsen
Solution Approach 1:
The patent applies local quality by differentiating the optical absorption characteristics in different wavelength ranges. The composition achieves high optical density (minimum 1 or more) in the overall 380-1100 nm range while controlling the differential optical density between visible (380-780 nm) and infrared (780-1100 nm) ranges to be 1 or less, enabling both light shielding and proper exposure/development
Solution Approach 2:
The patent optimizes the optical density parameters by incorporating coloring agents that provide balanced absorption across wavelengths. The minimum optical density of 1 or more ensures light shielding, while the controlled differential optical density maintains reliable exposure and development characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition effectively forms a cured film with improved pattern linearity even at lower exposure doses, enhancing the light-shielding properties and manufacturing efficiency of color filters and solid-state imaging devices.
Implementation Method 1
a visible light-absorbing coloring agent
Implementation Method 2
an infrared ray-absorbing coloring agent
Implementation Method 3
a photopolymerization initiator
Data Source
AI summary
An object of the present invention is to provide a curable composition capable of forming a cured film having excellent linearity of a pattern, and a light-shielding film, a color filter, a solid-state imaging device, and an infrared sensor, each formed using the curable composition. Another object of the present invention is to provide a pattern forming method and a method for manufacturing a color filter, each using the curable composition.The curable composition of the present invention is a curable composition containing a visible light-absorbing coloring agent, an infrared ray-absorbing coloring agent, a polymerizable compound, and a photopolymerization initiator,in which a minimum value in optical densities per 1 μm of a film thickness in a wavelength range of 380 to 1,100 nm of a coating film of the curable composition is 1 or more, andthe Δ optical density calculated by Formula (1) is 1 or less,Δ Optical density=|OD1−OD2| Formula (1)in Formula (1), OD1 represents a minimum value in optical densities per 1 μm of a film thickness in a wavelength range from 380 nm to 780 nm of the coating film, and OD2 represents a minimum value in optical densities per 1 μm of a film thickness in a wavelength range of more than 780 nm and 1,100 nm or less of the coating film.