Curable Composition Mold Releasability via Fluorinated Agent

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Solution Overview

Problem

Current curable compositions for photo imprints face challenges with mold releasability and ink jettability, particularly due to the degradation of surfactants and polymerizable compounds containing fluorine atoms, leading to poor shelf stability and defects in imprinted patterns.

Innovation Solution

Incorporating a non-polymerizable, fluorine-containing compound with a specific structure as a mold releasing agent into the curable composition, which improves both mold releasability and ink jettability by reducing surface tension and enhancing the stability of the composition.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a surfactant or polymerizable compound containing fluorine atoms is incorporated into the curable composition to improve mold releasability, then mold releasability is improved, but shelf stability deteriorates due to degradation of the surfactant or polymerizable compound

Engineering Contradiction:
Improvemold releasabilityVSAvoidshelf stability
Core Design Contradiction:
Ease of operationVSStability of the object's composition

Solution Approach 1:

The invention changes the chemical structure parameters of the fluorine-containing compound by specifying exact structural formulas (I) and (II) with defined functional groups (ether, amino, sulfide) and molecular weight ranges (500-5000). This structural parameter change allows the compound to provide mold releasability without the degradation issues of surfactants and polymerizable fluorinated compounds, thus improving shelf stability while maintaining ease of operation.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If the surface tension of the curable composition is reduced to improve ink jettability, then ink jettability is improved, but stability of the composition deteriorates

Engineering Contradiction:
Improveink jettabilityVSAvoidcomposition stability
Core Design Contradiction:
Ease of operationVSStability of the object's composition

Solution Approach 1:

The invention changes the surface tension parameters of the curable composition by incorporating fluorine-containing compounds with specific structures (formulas I and II) that have defined molecular weights and functional groups. These structural parameter changes enable the composition to achieve low surface tension for improved ink jettability while maintaining composition stability through the chemically stable fluorinated structure that does not degrade like conventional surfactants.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The curable composition exhibits improved mold releasability and ink jettability, maintaining stability and reducing defects in the imprinted patterns, while maintaining excellent photo-curability and etching resistance.

Implementation Method 1

a curable composition for photo imprints, comprising: a polymerizable compound (A); a photo-polymerization initiator (B)

Methodology Applied
Scientific EffectPhoto-polymerization: Photopolymerisation

Implementation Method 2

Incorporating a non-polymerizable, fluorine-containing compound with a specific structure as a mold releasing agent into the curable composition, which improves both mold releasability and ink jettability by reducing surface tension

Methodology Applied
Scientific EffectSurface tension reduction: Surface Tension

Data Source

PatentUS10175576B2Curable composition for photo imprints, method for forming pattern, fine pattern, and method for manufacturing semiconductor device
Publication Date: 2019.01.08 FUJIFILM CORP
  • US10175576B2 patent drawing
  • US10175576B2 patent drawing
  • US10175576B2 patent drawing

AI summary

Provided is a curable composition for photo imprints excellent in the mold releasability and the ink jettability. The curable composition for photo imprints, comprising: a polymerizable compound (A); a photo-polymerization initiator (B); and a mold releasing agent (C), the mold releasing agent (C) being represented by the formula (I) below. Rf represents a C1-8 fluorine-containing alkyl group having two or more fluorine atoms; m represents 1 or 2; L represents a single bond or divalent linking group; n represents 1 or 2; X represents a single bond, oxygen atom, sulfur atom, or nitrogen atom; R1 represents a C1-8 substituent being free from a polymerizable group; R2 represents a hydrogen atom, C1-8 substituent, or divalent linking group; p represents 1 or 2, q represents 0 or 1, and r represents 1 or 2; R1 and R2 may combine with each other to form a ring.