Curable Imprint Composition Reducing Mold Release Force

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Solution Overview

Problem

The thermal imprint method requires high pressure and is prone to dimensional inaccuracies due to thermal shrinkage, while the curing imprint method lacks a mold release agent to prevent deformation and breakage of cured products.

Innovation Solution

A curable composition comprising an organopolysiloxane with a radical polymerizable group, a radical generator, and a compound with a monovalent hydrocarbon group and poly(oxyalkylene) group, which reduces the mold release force by unevenly distributing on the surface, thereby lowering the surface free energy and improving pattern stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a thermal imprint method is used, then various materials can be selected, but high pressure is required and dimensional accuracy decreases due to thermal shrinkage

Engineering Contradiction:
Improvematerial selection flexibilityVSAvoiddimensional accuracy
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The invention changes the fundamental parameter of the imprinting process from thermal to chemical curing. By using a curable composition that cures upon contact with the mold rather than heating thermoplastic resin, the method eliminates thermal shrinkage and reduces required pressure, thereby improving dimensional accuracy while maintaining material versatility through the ability to select from various curable compositions

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the thermal-mechanical system (heating and high-pressure pressing) with a chemical system (curable composition that cures upon mold contact). This substitution eliminates the need for high pressure and thermal shrinkage control, directly resolving the contradiction between material flexibility and dimensional accuracy

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If a curing imprint method is used, then high pressure and high temperature can be omitted, but the cured product deforms and breaks due to insufficient mold release

Engineering Contradiction:
Improvepattern accuracyVSAvoidcured product integrity
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The invention introduces a mold release agent as an intermediary substance between the curable composition and the mold. This agent prevents excessive adhesion during curing, enabling easy mold release without deforming or breaking the cured product, thus resolving the contradiction between pattern accuracy and product integrity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention creates a composite system combining the curable composition and mold release agent. This composite approach allows the cured product to maintain high strength and pattern accuracy while the mold release agent prevents deformation during demolding, simultaneously achieving both contradictory requirements

Inventive Principle:
Principle #40Composite materials

3Productivity

If a spin coating method is used, then productivity is improved with high throughput, but uniformity of film thickness may be compromised

Engineering Contradiction:
ImprovethroughputVSAvoidfilm thickness uniformity
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The invention optimizes spin coating parameters (rotation speed, acceleration, coating material viscosity) to achieve both high throughput and uniform film thickness. By carefully controlling these parameters, the method maintains film uniformity while improving productivity

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition achieves a low mold release force, enhancing the accuracy and stability of the imprint pattern, and improves cleaning properties, while maintaining pattern resolution and strength.

Implementation Method 1

a radical generator; wherein some or all of hydrogen atoms of the monovalent hydrocarbon group are optionally substituted with halogen atoms

Methodology Applied
Scientific EffectPhotolysis: Photodissociation

Implementation Method 2

a compound that has a monovalent hydrocarbon group having 4 to 11 carbon atoms and a poly(oxyalkylene) group, in which some or all of hydrogen atoms of the monovalent hydrocarbon group are optionally substituted with halogen atoms

Methodology Applied
Scientific EffectSurface energy reduction: Surface Tension

Implementation Method 3

an organopolysiloxane having a radical polymerizable group

Methodology Applied
Scientific EffectPolymerization: Photopolymerisation

Data Source

PatentUS20230109153A1Curable composition for imprinting, coating film, method for producing film, cured product, method for producing imprint pattern, and method for producing device
Publication Date: 2023.04.06 FUJIFILM CORP
  • US20230109153A1 patent drawing
  • US20230109153A1 patent drawing
  • US20230109153A1 patent drawing

AI summary

There are provided a curable composition for imprinting, the curable composition including an organopolysiloxane having a radical polymerizable group, a radical generator, and a compound that has a monovalent hydrocarbon group having 4 to 11 carbon atoms and a poly(oxyalkylene) group, in which some or all of hydrogen atoms of the monovalent hydrocarbon group are optionally substituted with halogen atoms, a coating film of the composition, a method for producing the film, a cured product of the composition, a method for producing an imprint pattern using the composition, and a method for producing a device, the method including the method for producing an imprint pattern.