Current Detection Unit With Switching Sensors For DC Power Accuracy
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Solution Overview
Problem
Conventional substrate processing methods face challenges in achieving high output accuracy over the entire range of DC power due to the limitations of current sensors, which struggle to accurately detect and control both high and low current levels, especially when multiple targets with different power requirements are used, leading to inefficiencies in film forming and other substrate processing applications.
Innovation Solution
A substrate processing apparatus with a power supply device that includes a current detection unit with multiple current sensors having different detection ranges and a switching unit to select the appropriate sensor based on the set DC power value, ensuring accurate detection and control of current values across the entire output range, thereby maintaining high output accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single current sensor with a fixed detection range is used, then the device complexity is reduced, but the measurement precision deteriorates at extreme current values (both high and low)
Solution Approach 1:
The current detection system is segmented into multiple current sensors, each responsible for a specific detection range. The switching unit divides the overall current measurement task into segments, assigning appropriate sensors based on the required measurement range, thereby maintaining high precision across the entire output range without excessive complexity
Solution Approach 2:
The current detection system is made dynamic through the switching unit that can switch between different current sensors based on the set value of DC power. This dynamic adaptation allows the system to maintain optimal measurement precision for both high and low current values by selecting the most appropriate sensor for each operating condition
2Measurement precision
If multiple power supplies are used to cover different power ranges, then the output accuracy is improved, but the device complexity and installation space increase
Solution Approach 1:
A single power supply device is designed to perform multiple functions by incorporating a switching unit that can operate with different current sensors. This multi-functional design allows one power supply to accurately cover the entire output range from low to high power, eliminating the need for multiple separate power supplies and reducing installation space
Solution Approach 2:
The power supply device achieves high output accuracy across different power ranges by changing operational parameters - specifically, by switching between different current sensors with different detection ranges. This parameter change approach allows a single power supply to adapt to various output requirements without requiring multiple fixed-power supplies
3Device complexity
If a single current sensor is used for the entire output range, then the device complexity is reduced, but the productivity deteriorates due to inefficiencies in film forming
Solution Approach 1:
The current detection system is segmented into multiple specialized sensors, each optimized for specific current ranges required for different film forming processes. This segmentation enables precise current control during film forming operations, improving productivity by ensuring optimal performance for both high-power and low-power processing steps without significantly increasing overall system complexity
Data Source
AI summary
A substrate processing apparatus for performing a predetermined processing on a substrate includes a power supply device configured to supply a DC power. The power supply device includes a power supply and a current detection unit configured to detect a current value of a DC power from the power supply. The current detection unit includes a plurality of current sensors used for detecting the current value in the current detection unit and having different detection ranges for the current value, and a switching unit configured to switch the current sensors. The power supply is controlled such that the DC power from the power supply is maintained at a set value based on a detection result of the current detection unit, and the switching unit switches the current sensors depending on the set value of the DC power from the power supply.